JPS5362487A - Production of lilicon gate complementary type mos semiconductor device - Google Patents

Production of lilicon gate complementary type mos semiconductor device

Info

Publication number
JPS5362487A
JPS5362487A JP13730176A JP13730176A JPS5362487A JP S5362487 A JPS5362487 A JP S5362487A JP 13730176 A JP13730176 A JP 13730176A JP 13730176 A JP13730176 A JP 13730176A JP S5362487 A JPS5362487 A JP S5362487A
Authority
JP
Japan
Prior art keywords
lilicon
production
semiconductor device
type mos
mos semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13730176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS613094B2 (enrdf_load_stackoverflow
Inventor
Kazutaka Narita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13730176A priority Critical patent/JPS5362487A/ja
Publication of JPS5362487A publication Critical patent/JPS5362487A/ja
Publication of JPS613094B2 publication Critical patent/JPS613094B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP13730176A 1976-11-17 1976-11-17 Production of lilicon gate complementary type mos semiconductor device Granted JPS5362487A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13730176A JPS5362487A (en) 1976-11-17 1976-11-17 Production of lilicon gate complementary type mos semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13730176A JPS5362487A (en) 1976-11-17 1976-11-17 Production of lilicon gate complementary type mos semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59050953A Division JPS59181565A (ja) 1984-03-19 1984-03-19 半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
JPS5362487A true JPS5362487A (en) 1978-06-03
JPS613094B2 JPS613094B2 (enrdf_load_stackoverflow) 1986-01-30

Family

ID=15195476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13730176A Granted JPS5362487A (en) 1976-11-17 1976-11-17 Production of lilicon gate complementary type mos semiconductor device

Country Status (1)

Country Link
JP (1) JPS5362487A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS613094B2 (enrdf_load_stackoverflow) 1986-01-30

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