JPS5359486A - Reflection type electron-diffraction method - Google Patents
Reflection type electron-diffraction methodInfo
- Publication number
- JPS5359486A JPS5359486A JP13405676A JP13405676A JPS5359486A JP S5359486 A JPS5359486 A JP S5359486A JP 13405676 A JP13405676 A JP 13405676A JP 13405676 A JP13405676 A JP 13405676A JP S5359486 A JPS5359486 A JP S5359486A
- Authority
- JP
- Japan
- Prior art keywords
- reflection type
- diffraction method
- type electron
- diffraction
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13405676A JPS5359486A (en) | 1976-11-10 | 1976-11-10 | Reflection type electron-diffraction method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13405676A JPS5359486A (en) | 1976-11-10 | 1976-11-10 | Reflection type electron-diffraction method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5359486A true JPS5359486A (en) | 1978-05-29 |
Family
ID=15119322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13405676A Pending JPS5359486A (en) | 1976-11-10 | 1976-11-10 | Reflection type electron-diffraction method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5359486A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02216041A (ja) * | 1989-02-16 | 1990-08-28 | Nobuo Mikoshiba | 反射電子線回折装置 |
JPH02216042A (ja) * | 1989-02-16 | 1990-08-28 | Nobuo Mikoshiba | 反射電子線回折装置 |
JPH02216039A (ja) * | 1989-02-16 | 1990-08-28 | Shimadzu Corp | 反射電子回折装置 |
JPH02216746A (ja) * | 1989-02-16 | 1990-08-29 | Shimadzu Corp | 走査型電子回折装置の電子光学系 |
-
1976
- 1976-11-10 JP JP13405676A patent/JPS5359486A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02216041A (ja) * | 1989-02-16 | 1990-08-28 | Nobuo Mikoshiba | 反射電子線回折装置 |
JPH02216042A (ja) * | 1989-02-16 | 1990-08-28 | Nobuo Mikoshiba | 反射電子線回折装置 |
JPH02216039A (ja) * | 1989-02-16 | 1990-08-28 | Shimadzu Corp | 反射電子回折装置 |
JPH02216746A (ja) * | 1989-02-16 | 1990-08-29 | Shimadzu Corp | 走査型電子回折装置の電子光学系 |
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