JPS5358773A - Electron beam exposure method - Google Patents
Electron beam exposure methodInfo
- Publication number
- JPS5358773A JPS5358773A JP13396676A JP13396676A JPS5358773A JP S5358773 A JPS5358773 A JP S5358773A JP 13396676 A JP13396676 A JP 13396676A JP 13396676 A JP13396676 A JP 13396676A JP S5358773 A JPS5358773 A JP S5358773A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure method
- beam exposure
- distances
- imformation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Abstract
PURPOSE: Correction according to the moving distances of a stage is made possible by letting the distances between pattern position imformation origins coincide with one period of the outputs of a counter.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13396676A JPS5358773A (en) | 1976-11-08 | 1976-11-08 | Electron beam exposure method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13396676A JPS5358773A (en) | 1976-11-08 | 1976-11-08 | Electron beam exposure method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5358773A true JPS5358773A (en) | 1978-05-26 |
Family
ID=15117235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13396676A Pending JPS5358773A (en) | 1976-11-08 | 1976-11-08 | Electron beam exposure method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5358773A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50145865A (en) * | 1974-04-18 | 1975-11-22 |
-
1976
- 1976-11-08 JP JP13396676A patent/JPS5358773A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50145865A (en) * | 1974-04-18 | 1975-11-22 |
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