JPS5357974A - Electron beam exposure method - Google Patents
Electron beam exposure methodInfo
- Publication number
- JPS5357974A JPS5357974A JP13358076A JP13358076A JPS5357974A JP S5357974 A JPS5357974 A JP S5357974A JP 13358076 A JP13358076 A JP 13358076A JP 13358076 A JP13358076 A JP 13358076A JP S5357974 A JPS5357974 A JP S5357974A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure method
- beam exposure
- substrate
- resist film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13358076A JPS593847B2 (ja) | 1976-11-05 | 1976-11-05 | 電子ビ−ム露光方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13358076A JPS593847B2 (ja) | 1976-11-05 | 1976-11-05 | 電子ビ−ム露光方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5357974A true JPS5357974A (en) | 1978-05-25 |
JPS593847B2 JPS593847B2 (ja) | 1984-01-26 |
Family
ID=15108122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13358076A Expired JPS593847B2 (ja) | 1976-11-05 | 1976-11-05 | 電子ビ−ム露光方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS593847B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5534478A (en) * | 1978-09-01 | 1980-03-11 | Nec Corp | Forming pattern |
JPS6435549A (en) * | 1987-07-31 | 1989-02-06 | Matsushita Electronics Corp | Resist pattern forming method |
-
1976
- 1976-11-05 JP JP13358076A patent/JPS593847B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5534478A (en) * | 1978-09-01 | 1980-03-11 | Nec Corp | Forming pattern |
JPS6435549A (en) * | 1987-07-31 | 1989-02-06 | Matsushita Electronics Corp | Resist pattern forming method |
Also Published As
Publication number | Publication date |
---|---|
JPS593847B2 (ja) | 1984-01-26 |
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