JPS51148369A - Manufacturing method of semiconductor - Google Patents

Manufacturing method of semiconductor

Info

Publication number
JPS51148369A
JPS51148369A JP7259375A JP7259375A JPS51148369A JP S51148369 A JPS51148369 A JP S51148369A JP 7259375 A JP7259375 A JP 7259375A JP 7259375 A JP7259375 A JP 7259375A JP S51148369 A JPS51148369 A JP S51148369A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacturing
electron ray
enable
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7259375A
Other languages
Japanese (ja)
Other versions
JPS6035821B2 (en
Inventor
Kimio Yanagida
Kenichi Kawashima
Yasutaka Ban
Takaharu Shima
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50072593A priority Critical patent/JPS6035821B2/en
Publication of JPS51148369A publication Critical patent/JPS51148369A/en
Publication of JPS6035821B2 publication Critical patent/JPS6035821B2/en
Expired legal-status Critical Current

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  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To enable the minute processing shortening the process by making an electron ray resist to a stable insulator with necessary processing during or after the electron ray irradiation.
COPYRIGHT: (C)1976,JPO&Japio
JP50072593A 1975-06-14 1975-06-14 Manufacturing method of semiconductor device Expired JPS6035821B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50072593A JPS6035821B2 (en) 1975-06-14 1975-06-14 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50072593A JPS6035821B2 (en) 1975-06-14 1975-06-14 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS51148369A true JPS51148369A (en) 1976-12-20
JPS6035821B2 JPS6035821B2 (en) 1985-08-16

Family

ID=13493839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50072593A Expired JPS6035821B2 (en) 1975-06-14 1975-06-14 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6035821B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366285U (en) * 1976-11-02 1978-06-03

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62170646A (en) * 1986-01-20 1987-07-27 元旦ビユーティ工業株式会社 Roof structure using traverse shingling roof panel
JPH0412892Y2 (en) * 1986-07-31 1992-03-26
JPS644729U (en) * 1987-06-29 1989-01-12

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934018A (en) * 1972-07-31 1974-03-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934018A (en) * 1972-07-31 1974-03-29

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366285U (en) * 1976-11-02 1978-06-03
JPS6130192Y2 (en) * 1976-11-02 1986-09-04

Also Published As

Publication number Publication date
JPS6035821B2 (en) 1985-08-16

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