JPS51148369A - Manufacturing method of semiconductor - Google Patents
Manufacturing method of semiconductorInfo
- Publication number
- JPS51148369A JPS51148369A JP7259375A JP7259375A JPS51148369A JP S51148369 A JPS51148369 A JP S51148369A JP 7259375 A JP7259375 A JP 7259375A JP 7259375 A JP7259375 A JP 7259375A JP S51148369 A JPS51148369 A JP S51148369A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacturing
- electron ray
- enable
- making
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To enable the minute processing shortening the process by making an electron ray resist to a stable insulator with necessary processing during or after the electron ray irradiation.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50072593A JPS6035821B2 (en) | 1975-06-14 | 1975-06-14 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50072593A JPS6035821B2 (en) | 1975-06-14 | 1975-06-14 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51148369A true JPS51148369A (en) | 1976-12-20 |
JPS6035821B2 JPS6035821B2 (en) | 1985-08-16 |
Family
ID=13493839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50072593A Expired JPS6035821B2 (en) | 1975-06-14 | 1975-06-14 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6035821B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5366285U (en) * | 1976-11-02 | 1978-06-03 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62170646A (en) * | 1986-01-20 | 1987-07-27 | 元旦ビユーティ工業株式会社 | Roof structure using traverse shingling roof panel |
JPH0412892Y2 (en) * | 1986-07-31 | 1992-03-26 | ||
JPS644729U (en) * | 1987-06-29 | 1989-01-12 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4934018A (en) * | 1972-07-31 | 1974-03-29 |
-
1975
- 1975-06-14 JP JP50072593A patent/JPS6035821B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4934018A (en) * | 1972-07-31 | 1974-03-29 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5366285U (en) * | 1976-11-02 | 1978-06-03 | ||
JPS6130192Y2 (en) * | 1976-11-02 | 1986-09-04 |
Also Published As
Publication number | Publication date |
---|---|
JPS6035821B2 (en) | 1985-08-16 |
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