JPS5348680A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5348680A JPS5348680A JP12400876A JP12400876A JPS5348680A JP S5348680 A JPS5348680 A JP S5348680A JP 12400876 A JP12400876 A JP 12400876A JP 12400876 A JP12400876 A JP 12400876A JP S5348680 A JPS5348680 A JP S5348680A
- Authority
- JP
- Japan
- Prior art keywords
- insulation films
- field insulation
- semiconductor device
- wirings
- prevent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To prevent disconnection at the step parts of the Al wiring formed over field insulation films and prevent shorting with adjoining wirings by forming the field insulation films under electrode wirings in two layer structure of a thermal oxide film and a low temperature CVD nitride film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12400876A JPS5348680A (en) | 1976-10-15 | 1976-10-15 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12400876A JPS5348680A (en) | 1976-10-15 | 1976-10-15 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5348680A true JPS5348680A (en) | 1978-05-02 |
Family
ID=14874735
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12400876A Pending JPS5348680A (en) | 1976-10-15 | 1976-10-15 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5348680A (en) |
-
1976
- 1976-10-15 JP JP12400876A patent/JPS5348680A/en active Pending
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