JPS5348680A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5348680A
JPS5348680A JP12400876A JP12400876A JPS5348680A JP S5348680 A JPS5348680 A JP S5348680A JP 12400876 A JP12400876 A JP 12400876A JP 12400876 A JP12400876 A JP 12400876A JP S5348680 A JPS5348680 A JP S5348680A
Authority
JP
Japan
Prior art keywords
insulation films
field insulation
semiconductor device
wirings
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12400876A
Other languages
Japanese (ja)
Inventor
Takeo Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP12400876A priority Critical patent/JPS5348680A/en
Publication of JPS5348680A publication Critical patent/JPS5348680A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To prevent disconnection at the step parts of the Al wiring formed over field insulation films and prevent shorting with adjoining wirings by forming the field insulation films under electrode wirings in two layer structure of a thermal oxide film and a low temperature CVD nitride film.
COPYRIGHT: (C)1978,JPO&Japio
JP12400876A 1976-10-15 1976-10-15 Semiconductor device Pending JPS5348680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12400876A JPS5348680A (en) 1976-10-15 1976-10-15 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12400876A JPS5348680A (en) 1976-10-15 1976-10-15 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5348680A true JPS5348680A (en) 1978-05-02

Family

ID=14874735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12400876A Pending JPS5348680A (en) 1976-10-15 1976-10-15 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5348680A (en)

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