JPS5513981A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5513981A
JPS5513981A JP8757178A JP8757178A JPS5513981A JP S5513981 A JPS5513981 A JP S5513981A JP 8757178 A JP8757178 A JP 8757178A JP 8757178 A JP8757178 A JP 8757178A JP S5513981 A JPS5513981 A JP S5513981A
Authority
JP
Japan
Prior art keywords
area
contact
layer
type
diffusion area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8757178A
Other languages
Japanese (ja)
Other versions
JPS5932067B2 (en
Inventor
Hajime Matsui
Yoichi Eguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8757178A priority Critical patent/JPS5932067B2/en
Publication of JPS5513981A publication Critical patent/JPS5513981A/en
Publication of JPS5932067B2 publication Critical patent/JPS5932067B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To obtain complete ohmic contact by forming low density diffusion area in contact with high density diffusion area formed in an inside wiring area, and by forming a junction for a contact terminal in this area.
CONSTITUTION: An inside wiring contact layer 10 is formed in the area larger than a separation diffusion area 4 at the same time when a base diffusion area 5 is formed. The part composed of the area 4 surface that is half the size of the layer 10 becomes high density diffusion area 10a due to the formation by p type of the same conductivity in the area 4 of highly dense p type, and the part formed on the other half of the epi-layer 3 surface becomes low density diffusion area 10b due to the formation by p type with conductivity different from n type epi-layer 3. On the surface of the area 10b is formed a window 7a for contact terminal of the inside wiring, and the junction for a contact termainal of the inside wiring is done by forming Al on this window 7a. Thus, a complete ohmic contact can be obtained since the impurity density is low on the surface of the area 10b.
COPYRIGHT: (C)1980,JPO&Japio
JP8757178A 1978-07-17 1978-07-17 semiconductor equipment Expired JPS5932067B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8757178A JPS5932067B2 (en) 1978-07-17 1978-07-17 semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8757178A JPS5932067B2 (en) 1978-07-17 1978-07-17 semiconductor equipment

Publications (2)

Publication Number Publication Date
JPS5513981A true JPS5513981A (en) 1980-01-31
JPS5932067B2 JPS5932067B2 (en) 1984-08-06

Family

ID=13918676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8757178A Expired JPS5932067B2 (en) 1978-07-17 1978-07-17 semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS5932067B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010928U (en) * 1983-12-02 1985-01-25 株式会社大金製作所 damper disk

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6085172A (en) * 1983-10-13 1985-05-14 株式会社デンソー Automatic release apparatus for car door lock system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010928U (en) * 1983-12-02 1985-01-25 株式会社大金製作所 damper disk

Also Published As

Publication number Publication date
JPS5932067B2 (en) 1984-08-06

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