JPS5339888A - Semiconductor integrated circuit device and its production - Google Patents

Semiconductor integrated circuit device and its production

Info

Publication number
JPS5339888A
JPS5339888A JP11369276A JP11369276A JPS5339888A JP S5339888 A JPS5339888 A JP S5339888A JP 11369276 A JP11369276 A JP 11369276A JP 11369276 A JP11369276 A JP 11369276A JP S5339888 A JPS5339888 A JP S5339888A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
circuit device
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11369276A
Other languages
Japanese (ja)
Inventor
Kaoru Niino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11369276A priority Critical patent/JPS5339888A/en
Publication of JPS5339888A publication Critical patent/JPS5339888A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To lower corrector series resistance without producing crystal defects and obtain a bipolar IC of high performances by making shallow the diffusion depth of the isolation layers and collector sink layers reaching the buried layers provided in a semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP11369276A 1976-09-24 1976-09-24 Semiconductor integrated circuit device and its production Pending JPS5339888A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11369276A JPS5339888A (en) 1976-09-24 1976-09-24 Semiconductor integrated circuit device and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11369276A JPS5339888A (en) 1976-09-24 1976-09-24 Semiconductor integrated circuit device and its production

Publications (1)

Publication Number Publication Date
JPS5339888A true JPS5339888A (en) 1978-04-12

Family

ID=14618756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11369276A Pending JPS5339888A (en) 1976-09-24 1976-09-24 Semiconductor integrated circuit device and its production

Country Status (1)

Country Link
JP (1) JPS5339888A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5559765A (en) * 1978-10-27 1980-05-06 Hitachi Ltd Semiconductor integrated circuit device
JPS5595358A (en) * 1979-01-12 1980-07-19 Seiko Instr & Electronics Ltd Bipolar transistor
JPS60109274A (en) * 1983-11-18 1985-06-14 Hitachi Ltd Semiconductor ic device and manufacture thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5559765A (en) * 1978-10-27 1980-05-06 Hitachi Ltd Semiconductor integrated circuit device
JPS5595358A (en) * 1979-01-12 1980-07-19 Seiko Instr & Electronics Ltd Bipolar transistor
JPS60109274A (en) * 1983-11-18 1985-06-14 Hitachi Ltd Semiconductor ic device and manufacture thereof

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