JPS53142193A - Semiconductor intergrated circuit device and its manufacture - Google Patents
Semiconductor intergrated circuit device and its manufactureInfo
- Publication number
- JPS53142193A JPS53142193A JP5737677A JP5737677A JPS53142193A JP S53142193 A JPS53142193 A JP S53142193A JP 5737677 A JP5737677 A JP 5737677A JP 5737677 A JP5737677 A JP 5737677A JP S53142193 A JPS53142193 A JP S53142193A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- circuit device
- intergrated circuit
- semiconductor intergrated
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enhance the integral degree of the bipolar transistor IC as well as to increase the production yield, by securing such constitution that both the buried layer and the insulating isolator region can be formed simultaneously in a single manufacturing process.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5737677A JPS53142193A (en) | 1977-05-17 | 1977-05-17 | Semiconductor intergrated circuit device and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5737677A JPS53142193A (en) | 1977-05-17 | 1977-05-17 | Semiconductor intergrated circuit device and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53142193A true JPS53142193A (en) | 1978-12-11 |
Family
ID=13053868
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5737677A Pending JPS53142193A (en) | 1977-05-17 | 1977-05-17 | Semiconductor intergrated circuit device and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53142193A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5907767A (en) * | 1996-06-11 | 1999-05-25 | Nec Corporation | Backside-illuminated charge-coupled device imager and method for making the same |
-
1977
- 1977-05-17 JP JP5737677A patent/JPS53142193A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5907767A (en) * | 1996-06-11 | 1999-05-25 | Nec Corporation | Backside-illuminated charge-coupled device imager and method for making the same |
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