JPS533903A - Production of silicon crystal membrane - Google Patents

Production of silicon crystal membrane

Info

Publication number
JPS533903A
JPS533903A JP7703276A JP7703276A JPS533903A JP S533903 A JPS533903 A JP S533903A JP 7703276 A JP7703276 A JP 7703276A JP 7703276 A JP7703276 A JP 7703276A JP S533903 A JPS533903 A JP S533903A
Authority
JP
Japan
Prior art keywords
silicon crystal
production
membrane
crystal membrane
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7703276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5543434B2 (https=
Inventor
Haruo Ito
Tadashi Saito
Mitsunori Ketsusako
Nobuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP7703276A priority Critical patent/JPS533903A/ja
Publication of JPS533903A publication Critical patent/JPS533903A/ja
Publication of JPS5543434B2 publication Critical patent/JPS5543434B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP7703276A 1976-07-01 1976-07-01 Production of silicon crystal membrane Granted JPS533903A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7703276A JPS533903A (en) 1976-07-01 1976-07-01 Production of silicon crystal membrane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7703276A JPS533903A (en) 1976-07-01 1976-07-01 Production of silicon crystal membrane

Publications (2)

Publication Number Publication Date
JPS533903A true JPS533903A (en) 1978-01-14
JPS5543434B2 JPS5543434B2 (https=) 1980-11-06

Family

ID=13622403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7703276A Granted JPS533903A (en) 1976-07-01 1976-07-01 Production of silicon crystal membrane

Country Status (1)

Country Link
JP (1) JPS533903A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60104898A (ja) * 1983-11-09 1985-06-10 Aisin Seiki Co Ltd 低温容器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60104898A (ja) * 1983-11-09 1985-06-10 Aisin Seiki Co Ltd 低温容器

Also Published As

Publication number Publication date
JPS5543434B2 (https=) 1980-11-06

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