JPS5336471A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5336471A
JPS5336471A JP11080876A JP11080876A JPS5336471A JP S5336471 A JPS5336471 A JP S5336471A JP 11080876 A JP11080876 A JP 11080876A JP 11080876 A JP11080876 A JP 11080876A JP S5336471 A JPS5336471 A JP S5336471A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
erosion
performance
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11080876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5435069B2 (OSRAM
Inventor
Kohei Yamada
Koichiro Yamada
Manabu Matsuzawa
Takeshi Uryu
Yoshio Nonaka
Takashi Azuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11080876A priority Critical patent/JPS5336471A/ja
Publication of JPS5336471A publication Critical patent/JPS5336471A/ja
Publication of JPS5435069B2 publication Critical patent/JPS5435069B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Element Separation (AREA)
JP11080876A 1976-09-17 1976-09-17 Manufacture of semiconductor device Granted JPS5336471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11080876A JPS5336471A (en) 1976-09-17 1976-09-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11080876A JPS5336471A (en) 1976-09-17 1976-09-17 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5336471A true JPS5336471A (en) 1978-04-04
JPS5435069B2 JPS5435069B2 (OSRAM) 1979-10-31

Family

ID=14545172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11080876A Granted JPS5336471A (en) 1976-09-17 1976-09-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5336471A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125627A (en) * 1979-03-22 1980-09-27 Hitachi Ltd Formation of electrode for semiconductor device
JPS5818938A (ja) * 1981-07-27 1983-02-03 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン 集積回路構造体
JPS5827342A (ja) * 1981-07-27 1983-02-18 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン 誘電体分離領域形成方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125627A (en) * 1979-03-22 1980-09-27 Hitachi Ltd Formation of electrode for semiconductor device
JPS5818938A (ja) * 1981-07-27 1983-02-03 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン 集積回路構造体
JPS5827342A (ja) * 1981-07-27 1983-02-18 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン 誘電体分離領域形成方法

Also Published As

Publication number Publication date
JPS5435069B2 (OSRAM) 1979-10-31

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