JPS5334463A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5334463A
JPS5334463A JP10792676A JP10792676A JPS5334463A JP S5334463 A JPS5334463 A JP S5334463A JP 10792676 A JP10792676 A JP 10792676A JP 10792676 A JP10792676 A JP 10792676A JP S5334463 A JPS5334463 A JP S5334463A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
diffusing
sio
suppressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10792676A
Other languages
Japanese (ja)
Inventor
Yoshihide Asai
Tsuneo Ajioka
Shintaro Ushio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP10792676A priority Critical patent/JPS5334463A/en
Publication of JPS5334463A publication Critical patent/JPS5334463A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To diffuse uniformly with a good reproduction, by diffusing in inert gas atmosphere at a low temperature range of 900 to 950°C and suppressing the defects caused for SiO2 of diffusing source.
COPYRIGHT: (C)1978,JPO&Japio
JP10792676A 1976-09-10 1976-09-10 Manufacture for semiconductor device Pending JPS5334463A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10792676A JPS5334463A (en) 1976-09-10 1976-09-10 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10792676A JPS5334463A (en) 1976-09-10 1976-09-10 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5334463A true JPS5334463A (en) 1978-03-31

Family

ID=14471541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10792676A Pending JPS5334463A (en) 1976-09-10 1976-09-10 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5334463A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766641A (en) * 1980-10-09 1982-04-22 Mitsubishi Electric Corp Plasma etching
JPS62205281A (en) * 1986-03-04 1987-09-09 Matsushita Electric Ind Co Ltd Plasma device
JPS62205280A (en) * 1986-03-04 1987-09-09 Matsushita Electric Ind Co Ltd Plasma device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5013477A (en) * 1973-04-27 1975-02-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5013477A (en) * 1973-04-27 1975-02-12

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766641A (en) * 1980-10-09 1982-04-22 Mitsubishi Electric Corp Plasma etching
JPS62205281A (en) * 1986-03-04 1987-09-09 Matsushita Electric Ind Co Ltd Plasma device
JPS62205280A (en) * 1986-03-04 1987-09-09 Matsushita Electric Ind Co Ltd Plasma device

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