JPS5333077A - Semiconductor integrated circuit - Google Patents

Semiconductor integrated circuit

Info

Publication number
JPS5333077A
JPS5333077A JP10754376A JP10754376A JPS5333077A JP S5333077 A JPS5333077 A JP S5333077A JP 10754376 A JP10754376 A JP 10754376A JP 10754376 A JP10754376 A JP 10754376A JP S5333077 A JPS5333077 A JP S5333077A
Authority
JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
igfets
silicide
beforehand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10754376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6134255B2 (enrdf_load_stackoverflow
Inventor
Yoji Yamanaka
Toshio Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10754376A priority Critical patent/JPS5333077A/ja
Publication of JPS5333077A publication Critical patent/JPS5333077A/ja
Publication of JPS6134255B2 publication Critical patent/JPS6134255B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP10754376A 1976-09-08 1976-09-08 Semiconductor integrated circuit Granted JPS5333077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10754376A JPS5333077A (en) 1976-09-08 1976-09-08 Semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10754376A JPS5333077A (en) 1976-09-08 1976-09-08 Semiconductor integrated circuit

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59094201A Division JPS6016470A (ja) 1984-05-11 1984-05-11 半導体集積回路

Publications (2)

Publication Number Publication Date
JPS5333077A true JPS5333077A (en) 1978-03-28
JPS6134255B2 JPS6134255B2 (enrdf_load_stackoverflow) 1986-08-06

Family

ID=14461843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10754376A Granted JPS5333077A (en) 1976-09-08 1976-09-08 Semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5333077A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS568846A (en) * 1979-07-03 1981-01-29 Nec Corp Semiconductor integrated circuit
JPS57167660A (en) * 1981-03-30 1982-10-15 Fujitsu Ltd Forming method for high-melting point metallic silicide layer
JPS6052044A (ja) * 1983-05-06 1985-03-23 テキサス　インスツルメンツ　インコ−ポレイテツド 金属珪化物形成方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS568846A (en) * 1979-07-03 1981-01-29 Nec Corp Semiconductor integrated circuit
JPS57167660A (en) * 1981-03-30 1982-10-15 Fujitsu Ltd Forming method for high-melting point metallic silicide layer
JPS6052044A (ja) * 1983-05-06 1985-03-23 テキサス　インスツルメンツ　インコ−ポレイテツド 金属珪化物形成方法

Also Published As

Publication number Publication date
JPS6134255B2 (enrdf_load_stackoverflow) 1986-08-06

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