JPS5326575A - Ion etching method - Google Patents
Ion etching methodInfo
- Publication number
- JPS5326575A JPS5326575A JP10021276A JP10021276A JPS5326575A JP S5326575 A JPS5326575 A JP S5326575A JP 10021276 A JP10021276 A JP 10021276A JP 10021276 A JP10021276 A JP 10021276A JP S5326575 A JPS5326575 A JP S5326575A
- Authority
- JP
- Japan
- Prior art keywords
- metallic
- etching method
- ion etching
- film
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Soft Magnetic Materials (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10021276A JPS5326575A (en) | 1976-08-24 | 1976-08-24 | Ion etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10021276A JPS5326575A (en) | 1976-08-24 | 1976-08-24 | Ion etching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5326575A true JPS5326575A (en) | 1978-03-11 |
JPS5619735B2 JPS5619735B2 (ja) | 1981-05-09 |
Family
ID=14267983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10021276A Granted JPS5326575A (en) | 1976-08-24 | 1976-08-24 | Ion etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5326575A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01178318A (ja) * | 1988-01-08 | 1989-07-14 | Nkk Corp | タイト焼鈍コイル巻戻し設備 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6347243U (ja) * | 1986-09-10 | 1988-03-30 | ||
JPH082583Y2 (ja) * | 1989-04-21 | 1996-01-29 | 株式会社ユニシアジェックス | 温度センサ |
-
1976
- 1976-08-24 JP JP10021276A patent/JPS5326575A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01178318A (ja) * | 1988-01-08 | 1989-07-14 | Nkk Corp | タイト焼鈍コイル巻戻し設備 |
Also Published As
Publication number | Publication date |
---|---|
JPS5619735B2 (ja) | 1981-05-09 |
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