JPS53142870A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS53142870A JPS53142870A JP5706777A JP5706777A JPS53142870A JP S53142870 A JPS53142870 A JP S53142870A JP 5706777 A JP5706777 A JP 5706777A JP 5706777 A JP5706777 A JP 5706777A JP S53142870 A JPS53142870 A JP S53142870A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- wafer
- sio
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5706777A JPS53142870A (en) | 1977-05-19 | 1977-05-19 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5706777A JPS53142870A (en) | 1977-05-19 | 1977-05-19 | Manufacture for semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53142870A true JPS53142870A (en) | 1978-12-12 |
JPS627695B2 JPS627695B2 (ja) | 1987-02-18 |
Family
ID=13045091
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5706777A Granted JPS53142870A (en) | 1977-05-19 | 1977-05-19 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53142870A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5638825A (en) * | 1979-09-07 | 1981-04-14 | Nec Corp | Formation of insulating film |
JPS58218122A (ja) * | 1982-05-10 | 1983-12-19 | Internatl Rectifier Corp Japan Ltd | 半導体装置の製造方法 |
-
1977
- 1977-05-19 JP JP5706777A patent/JPS53142870A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5638825A (en) * | 1979-09-07 | 1981-04-14 | Nec Corp | Formation of insulating film |
JPS58218122A (ja) * | 1982-05-10 | 1983-12-19 | Internatl Rectifier Corp Japan Ltd | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS627695B2 (ja) | 1987-02-18 |
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