JPS53142870A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS53142870A
JPS53142870A JP5706777A JP5706777A JPS53142870A JP S53142870 A JPS53142870 A JP S53142870A JP 5706777 A JP5706777 A JP 5706777A JP 5706777 A JP5706777 A JP 5706777A JP S53142870 A JPS53142870 A JP S53142870A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
wafer
sio
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5706777A
Other languages
English (en)
Other versions
JPS627695B2 (ja
Inventor
Takashi Yabu
Kazunari Shirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5706777A priority Critical patent/JPS53142870A/ja
Publication of JPS53142870A publication Critical patent/JPS53142870A/ja
Publication of JPS627695B2 publication Critical patent/JPS627695B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
JP5706777A 1977-05-19 1977-05-19 Manufacture for semiconductor device Granted JPS53142870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5706777A JPS53142870A (en) 1977-05-19 1977-05-19 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5706777A JPS53142870A (en) 1977-05-19 1977-05-19 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS53142870A true JPS53142870A (en) 1978-12-12
JPS627695B2 JPS627695B2 (ja) 1987-02-18

Family

ID=13045091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5706777A Granted JPS53142870A (en) 1977-05-19 1977-05-19 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53142870A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638825A (en) * 1979-09-07 1981-04-14 Nec Corp Formation of insulating film
JPS58218122A (ja) * 1982-05-10 1983-12-19 Internatl Rectifier Corp Japan Ltd 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638825A (en) * 1979-09-07 1981-04-14 Nec Corp Formation of insulating film
JPS58218122A (ja) * 1982-05-10 1983-12-19 Internatl Rectifier Corp Japan Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS627695B2 (ja) 1987-02-18

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