JPS53128986A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS53128986A
JPS53128986A JP4352777A JP4352777A JPS53128986A JP S53128986 A JPS53128986 A JP S53128986A JP 4352777 A JP4352777 A JP 4352777A JP 4352777 A JP4352777 A JP 4352777A JP S53128986 A JPS53128986 A JP S53128986A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
substrate
decrease
mixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4352777A
Other languages
Japanese (ja)
Inventor
Nozomi Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4352777A priority Critical patent/JPS53128986A/en
Publication of JPS53128986A publication Critical patent/JPS53128986A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the amount of the heavy metal to be mixed into the substrate as well as to decrease the crystal fault caused through the thermal treatment in the process during which the element or the circuit is formed to the semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP4352777A 1977-04-18 1977-04-18 Manufacture of semiconductor device Pending JPS53128986A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4352777A JPS53128986A (en) 1977-04-18 1977-04-18 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4352777A JPS53128986A (en) 1977-04-18 1977-04-18 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53128986A true JPS53128986A (en) 1978-11-10

Family

ID=12666207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4352777A Pending JPS53128986A (en) 1977-04-18 1977-04-18 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53128986A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127368A (en) * 1982-01-18 1983-07-29 フエアチアイルド・カメラ・アンド・インストルメント・コ−ポレ−シヨン Memory cell implanted with ions for high integration ram

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127368A (en) * 1982-01-18 1983-07-29 フエアチアイルド・カメラ・アンド・インストルメント・コ−ポレ−シヨン Memory cell implanted with ions for high integration ram

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