JPS53125773A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS53125773A
JPS53125773A JP4051677A JP4051677A JPS53125773A JP S53125773 A JPS53125773 A JP S53125773A JP 4051677 A JP4051677 A JP 4051677A JP 4051677 A JP4051677 A JP 4051677A JP S53125773 A JPS53125773 A JP S53125773A
Authority
JP
Japan
Prior art keywords
manufacture
ion implantation
semiconductor device
oxidizing
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4051677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6227552B2 (enExample
Inventor
Yasuaki Hokari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4051677A priority Critical patent/JPS53125773A/ja
Publication of JPS53125773A publication Critical patent/JPS53125773A/ja
Publication of JPS6227552B2 publication Critical patent/JPS6227552B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)
JP4051677A 1977-04-08 1977-04-08 Manufacture for semiconductor device Granted JPS53125773A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4051677A JPS53125773A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4051677A JPS53125773A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS53125773A true JPS53125773A (en) 1978-11-02
JPS6227552B2 JPS6227552B2 (enExample) 1987-06-15

Family

ID=12582675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4051677A Granted JPS53125773A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53125773A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02275640A (ja) * 1989-01-26 1990-11-09 Matsushita Electric Works Ltd 静電誘導半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521871A (en) * 1975-06-24 1977-01-08 Sanki Eng Co Ltd Shuttle fork of stcker crane

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521871A (en) * 1975-06-24 1977-01-08 Sanki Eng Co Ltd Shuttle fork of stcker crane

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02275640A (ja) * 1989-01-26 1990-11-09 Matsushita Electric Works Ltd 静電誘導半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6227552B2 (enExample) 1987-06-15

Similar Documents

Publication Publication Date Title
JPS5331964A (en) Production of semiconductor substrates
JPS53125773A (en) Manufacture for semiconductor device
JPS5247676A (en) Process for production of semiconductor device
JPS53125776A (en) Manufacture for semiconductor device
JPS5432970A (en) Appreciating method for semiconductor device
JPS52154367A (en) Production of semiconductor device
JPS52127179A (en) Manufacturing method of semiconductor device
JPS5267963A (en) Manufacture of semiconductor unit
JPS5240977A (en) Process for production of semiconductor device
JPS5377168A (en) Production of semiconductor device
JPS51113461A (en) A method for manufacturing semiconductor devices
JPS53145572A (en) Production of semiconductor device
JPS5272162A (en) Production of semiconductor device
JPS53120264A (en) Manufacture of semiconductor device
JPS5273673A (en) Production of semiconductor device
JPS5267574A (en) Manufacture for semiconductor device
JPS5435683A (en) Manufacture of semiconductor device
JPS547884A (en) Manufacture for semiconductor device
JPS54586A (en) Production of semiconductor device
JPS5390784A (en) Production of semiconductor device
JPS53108773A (en) Production of semiconductor device
JPS5380160A (en) Manufacture of substrate for semiconductor device
JPS5350670A (en) Production of semiconductor device
JPS5293276A (en) Manufacture for semiconductor device
JPS5247677A (en) Process for production of semiconductor device