JPS53103380A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53103380A JPS53103380A JP1775477A JP1775477A JPS53103380A JP S53103380 A JPS53103380 A JP S53103380A JP 1775477 A JP1775477 A JP 1775477A JP 1775477 A JP1775477 A JP 1775477A JP S53103380 A JPS53103380 A JP S53103380A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- film
- gate
- avert
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE: To avert the degradation in gate insulation dielectric strength by covering the surface of gate, source and drain regions with a thermal oxide film and further forming a PSG film as an intermediate film thereby flattening the surface.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1775477A JPS53103380A (en) | 1977-02-22 | 1977-02-22 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1775477A JPS53103380A (en) | 1977-02-22 | 1977-02-22 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53103380A true JPS53103380A (en) | 1978-09-08 |
Family
ID=11952510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1775477A Pending JPS53103380A (en) | 1977-02-22 | 1977-02-22 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53103380A (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4849382A (en) * | 1971-10-22 | 1973-07-12 | ||
JPS4933580A (en) * | 1972-07-26 | 1974-03-28 | ||
JPS506143A (en) * | 1973-05-21 | 1975-01-22 | ||
JPS5066182A (en) * | 1973-10-12 | 1975-06-04 | ||
JPS5253666A (en) * | 1975-10-29 | 1977-04-30 | Hitachi Ltd | Method of preventing impurity diffusion from doped oxide |
-
1977
- 1977-02-22 JP JP1775477A patent/JPS53103380A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4849382A (en) * | 1971-10-22 | 1973-07-12 | ||
JPS4933580A (en) * | 1972-07-26 | 1974-03-28 | ||
JPS506143A (en) * | 1973-05-21 | 1975-01-22 | ||
JPS5066182A (en) * | 1973-10-12 | 1975-06-04 | ||
JPS5253666A (en) * | 1975-10-29 | 1977-04-30 | Hitachi Ltd | Method of preventing impurity diffusion from doped oxide |
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