JPS5285475A - Formation method of high molecular film patterns by high energy beams - Google Patents
Formation method of high molecular film patterns by high energy beamsInfo
- Publication number
- JPS5285475A JPS5285475A JP162476A JP162476A JPS5285475A JP S5285475 A JPS5285475 A JP S5285475A JP 162476 A JP162476 A JP 162476A JP 162476 A JP162476 A JP 162476A JP S5285475 A JPS5285475 A JP S5285475A
- Authority
- JP
- Japan
- Prior art keywords
- film patterns
- molecular film
- energy beams
- formation method
- high energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Polymerisation Methods In General (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
PURPOSE: To form high molecular film patterns of high resolution and high sensitivity to high energy beams and high etching resistance by using homopolymer and copolymer as high energy beam resist.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP162476A JPS5285475A (en) | 1976-01-09 | 1976-01-09 | Formation method of high molecular film patterns by high energy beams |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP162476A JPS5285475A (en) | 1976-01-09 | 1976-01-09 | Formation method of high molecular film patterns by high energy beams |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5285475A true JPS5285475A (en) | 1977-07-15 |
JPS566531B2 JPS566531B2 (en) | 1981-02-12 |
Family
ID=11506675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP162476A Granted JPS5285475A (en) | 1976-01-09 | 1976-01-09 | Formation method of high molecular film patterns by high energy beams |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5285475A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60102238A (en) * | 1983-11-08 | 1985-06-06 | Aida Eng Ltd | Travelling device of floater base |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4974236A (en) * | 1972-10-16 | 1974-07-17 | ||
JPS5023825A (en) * | 1973-06-27 | 1975-03-14 |
-
1976
- 1976-01-09 JP JP162476A patent/JPS5285475A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4974236A (en) * | 1972-10-16 | 1974-07-17 | ||
JPS5023825A (en) * | 1973-06-27 | 1975-03-14 |
Also Published As
Publication number | Publication date |
---|---|
JPS566531B2 (en) | 1981-02-12 |
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