JPS5432975A - Formation method of pattern on resist film and resist film - Google Patents

Formation method of pattern on resist film and resist film

Info

Publication number
JPS5432975A
JPS5432975A JP9878577A JP9878577A JPS5432975A JP S5432975 A JPS5432975 A JP S5432975A JP 9878577 A JP9878577 A JP 9878577A JP 9878577 A JP9878577 A JP 9878577A JP S5432975 A JPS5432975 A JP S5432975A
Authority
JP
Japan
Prior art keywords
resist film
pattern
formation method
resist
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9878577A
Other languages
Japanese (ja)
Other versions
JPS5646258B2 (en
Inventor
Nobufumi Atoda
Masanori Komuro
Kyuzo Kawakatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP9878577A priority Critical patent/JPS5432975A/en
Publication of JPS5432975A publication Critical patent/JPS5432975A/en
Publication of JPS5646258B2 publication Critical patent/JPS5646258B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To form a pattern by varying molecular weight or bridge-formation dedensity in the resist-film-thickness direction.
COPYRIGHT: (C)1979,JPO&Japio
JP9878577A 1977-08-19 1977-08-19 Formation method of pattern on resist film and resist film Granted JPS5432975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9878577A JPS5432975A (en) 1977-08-19 1977-08-19 Formation method of pattern on resist film and resist film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9878577A JPS5432975A (en) 1977-08-19 1977-08-19 Formation method of pattern on resist film and resist film

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP55126552A Division JPS5928044B2 (en) 1980-09-11 1980-09-11 Negative resist film and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS5432975A true JPS5432975A (en) 1979-03-10
JPS5646258B2 JPS5646258B2 (en) 1981-10-31

Family

ID=14229015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9878577A Granted JPS5432975A (en) 1977-08-19 1977-08-19 Formation method of pattern on resist film and resist film

Country Status (1)

Country Link
JP (1) JPS5432975A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55140836A (en) * 1979-04-19 1980-11-04 Fujitsu Ltd Pattern forming method
WO1986001009A1 (en) * 1984-07-23 1986-02-13 Nippon Telegraph And Telephone Corporation Pattern formation

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53147465A (en) * 1977-05-27 1978-12-22 Fujitsu Ltd Forming method of patterns for lift-off

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53147465A (en) * 1977-05-27 1978-12-22 Fujitsu Ltd Forming method of patterns for lift-off

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55140836A (en) * 1979-04-19 1980-11-04 Fujitsu Ltd Pattern forming method
WO1986001009A1 (en) * 1984-07-23 1986-02-13 Nippon Telegraph And Telephone Corporation Pattern formation
US4699870A (en) * 1984-07-23 1987-10-13 Nippon Telegraph And Telephone Corporation Patterning method

Also Published As

Publication number Publication date
JPS5646258B2 (en) 1981-10-31

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