JPS5432975A - Formation method of pattern on resist film and resist film - Google Patents
Formation method of pattern on resist film and resist filmInfo
- Publication number
- JPS5432975A JPS5432975A JP9878577A JP9878577A JPS5432975A JP S5432975 A JPS5432975 A JP S5432975A JP 9878577 A JP9878577 A JP 9878577A JP 9878577 A JP9878577 A JP 9878577A JP S5432975 A JPS5432975 A JP S5432975A
- Authority
- JP
- Japan
- Prior art keywords
- resist film
- pattern
- formation method
- resist
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To form a pattern by varying molecular weight or bridge-formation dedensity in the resist-film-thickness direction.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9878577A JPS5432975A (en) | 1977-08-19 | 1977-08-19 | Formation method of pattern on resist film and resist film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9878577A JPS5432975A (en) | 1977-08-19 | 1977-08-19 | Formation method of pattern on resist film and resist film |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55126552A Division JPS5928044B2 (en) | 1980-09-11 | 1980-09-11 | Negative resist film and its manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5432975A true JPS5432975A (en) | 1979-03-10 |
JPS5646258B2 JPS5646258B2 (en) | 1981-10-31 |
Family
ID=14229015
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9878577A Granted JPS5432975A (en) | 1977-08-19 | 1977-08-19 | Formation method of pattern on resist film and resist film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5432975A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55140836A (en) * | 1979-04-19 | 1980-11-04 | Fujitsu Ltd | Pattern forming method |
WO1986001009A1 (en) * | 1984-07-23 | 1986-02-13 | Nippon Telegraph And Telephone Corporation | Pattern formation |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53147465A (en) * | 1977-05-27 | 1978-12-22 | Fujitsu Ltd | Forming method of patterns for lift-off |
-
1977
- 1977-08-19 JP JP9878577A patent/JPS5432975A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53147465A (en) * | 1977-05-27 | 1978-12-22 | Fujitsu Ltd | Forming method of patterns for lift-off |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55140836A (en) * | 1979-04-19 | 1980-11-04 | Fujitsu Ltd | Pattern forming method |
WO1986001009A1 (en) * | 1984-07-23 | 1986-02-13 | Nippon Telegraph And Telephone Corporation | Pattern formation |
US4699870A (en) * | 1984-07-23 | 1987-10-13 | Nippon Telegraph And Telephone Corporation | Patterning method |
Also Published As
Publication number | Publication date |
---|---|
JPS5646258B2 (en) | 1981-10-31 |
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