JPS5646258B2 - - Google Patents

Info

Publication number
JPS5646258B2
JPS5646258B2 JP9878577A JP9878577A JPS5646258B2 JP S5646258 B2 JPS5646258 B2 JP S5646258B2 JP 9878577 A JP9878577 A JP 9878577A JP 9878577 A JP9878577 A JP 9878577A JP S5646258 B2 JPS5646258 B2 JP S5646258B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9878577A
Other languages
Japanese (ja)
Other versions
JPS5432975A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9878577A priority Critical patent/JPS5432975A/en
Publication of JPS5432975A publication Critical patent/JPS5432975A/en
Publication of JPS5646258B2 publication Critical patent/JPS5646258B2/ja
Granted legal-status Critical Current

Links

JP9878577A 1977-08-19 1977-08-19 Formation method of pattern on resist film and resist film Granted JPS5432975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9878577A JPS5432975A (en) 1977-08-19 1977-08-19 Formation method of pattern on resist film and resist film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9878577A JPS5432975A (en) 1977-08-19 1977-08-19 Formation method of pattern on resist film and resist film

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP55126552A Division JPS5928044B2 (en) 1980-09-11 1980-09-11 Negative resist film and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS5432975A JPS5432975A (en) 1979-03-10
JPS5646258B2 true JPS5646258B2 (en) 1981-10-31

Family

ID=14229015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9878577A Granted JPS5432975A (en) 1977-08-19 1977-08-19 Formation method of pattern on resist film and resist film

Country Status (1)

Country Link
JP (1) JPS5432975A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55140836A (en) * 1979-04-19 1980-11-04 Fujitsu Ltd Pattern forming method
DE3577930D1 (en) * 1984-07-23 1990-06-28 Nippon Telegraph & Telephone EDUCATION OF MOTIVES.

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53147465A (en) * 1977-05-27 1978-12-22 Fujitsu Ltd Forming method of patterns for lift-off

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53147465A (en) * 1977-05-27 1978-12-22 Fujitsu Ltd Forming method of patterns for lift-off

Also Published As

Publication number Publication date
JPS5432975A (en) 1979-03-10

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