JPS5274279A - Washing of semiconductor wafers - Google Patents

Washing of semiconductor wafers

Info

Publication number
JPS5274279A
JPS5274279A JP15041975A JP15041975A JPS5274279A JP S5274279 A JPS5274279 A JP S5274279A JP 15041975 A JP15041975 A JP 15041975A JP 15041975 A JP15041975 A JP 15041975A JP S5274279 A JPS5274279 A JP S5274279A
Authority
JP
Japan
Prior art keywords
washing
semiconductor wafers
checking
purity
pure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15041975A
Other languages
Japanese (ja)
Inventor
Riichi Amano
Junichi Nakao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15041975A priority Critical patent/JPS5274279A/en
Publication of JPS5274279A publication Critical patent/JPS5274279A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

PURPOSE: The yield of production of semiconductor devices is improved by checking the purity of the pure water to be supplied into a washing tank by a resistivity method, continuously checking the purity of the pure water in the washing tank or after washing and ending the washing after checking the perfectness of the washing of waters, in washing of semiconductor wafers.
COPYRIGHT: (C)1977,JPO&Japio
JP15041975A 1975-12-17 1975-12-17 Washing of semiconductor wafers Pending JPS5274279A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15041975A JPS5274279A (en) 1975-12-17 1975-12-17 Washing of semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15041975A JPS5274279A (en) 1975-12-17 1975-12-17 Washing of semiconductor wafers

Publications (1)

Publication Number Publication Date
JPS5274279A true JPS5274279A (en) 1977-06-22

Family

ID=15496518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15041975A Pending JPS5274279A (en) 1975-12-17 1975-12-17 Washing of semiconductor wafers

Country Status (1)

Country Link
JP (1) JPS5274279A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618427A (en) * 1979-07-23 1981-02-21 Fujitsu Ltd Washing method for semiconductor substrate with pure water
JPS57501257A (en) * 1980-03-06 1982-07-15
JPS5989535U (en) * 1982-12-09 1984-06-18 株式会社東芝 Semiconductor wafer cleaning equipment
JPS63261176A (en) * 1987-04-20 1988-10-27 Toshiba Corp Specific resistance measuring instrument
JPH01274435A (en) * 1988-04-27 1989-11-02 Japan Organo Co Ltd Control apparatus for semiconductor-wafer cleaning water
JPH01312830A (en) * 1988-06-10 1989-12-18 Tokyo Electron Ltd Cleaning
JPH02169077A (en) * 1988-12-21 1990-06-29 Dan Sangyo Kk Bottle washing device
JPH04255219A (en) * 1991-02-07 1992-09-10 Nec Yamagata Ltd Manufacture of semiconductor device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618427A (en) * 1979-07-23 1981-02-21 Fujitsu Ltd Washing method for semiconductor substrate with pure water
JPS57501257A (en) * 1980-03-06 1982-07-15
JPS5989535U (en) * 1982-12-09 1984-06-18 株式会社東芝 Semiconductor wafer cleaning equipment
JPS6242535Y2 (en) * 1982-12-09 1987-10-31
JPS63261176A (en) * 1987-04-20 1988-10-27 Toshiba Corp Specific resistance measuring instrument
JPH01274435A (en) * 1988-04-27 1989-11-02 Japan Organo Co Ltd Control apparatus for semiconductor-wafer cleaning water
JPH01312830A (en) * 1988-06-10 1989-12-18 Tokyo Electron Ltd Cleaning
JPH02169077A (en) * 1988-12-21 1990-06-29 Dan Sangyo Kk Bottle washing device
JPH04255219A (en) * 1991-02-07 1992-09-10 Nec Yamagata Ltd Manufacture of semiconductor device

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