JPS5263059A - Method of measuring response characteristic of detector in scanning ty pe electronic microscope - Google Patents

Method of measuring response characteristic of detector in scanning ty pe electronic microscope

Info

Publication number
JPS5263059A
JPS5263059A JP13889575A JP13889575A JPS5263059A JP S5263059 A JPS5263059 A JP S5263059A JP 13889575 A JP13889575 A JP 13889575A JP 13889575 A JP13889575 A JP 13889575A JP S5263059 A JPS5263059 A JP S5263059A
Authority
JP
Japan
Prior art keywords
detector
response characteristic
scanning
electronic microscope
measuring response
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13889575A
Other languages
English (en)
Inventor
Yasuo Furukawa
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13889575A priority Critical patent/JPS5263059A/ja
Publication of JPS5263059A publication Critical patent/JPS5263059A/ja
Pending legal-status Critical Current

Links

JP13889575A 1975-11-19 1975-11-19 Method of measuring response characteristic of detector in scanning ty pe electronic microscope Pending JPS5263059A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13889575A JPS5263059A (en) 1975-11-19 1975-11-19 Method of measuring response characteristic of detector in scanning ty pe electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13889575A JPS5263059A (en) 1975-11-19 1975-11-19 Method of measuring response characteristic of detector in scanning ty pe electronic microscope

Publications (1)

Publication Number Publication Date
JPS5263059A true JPS5263059A (en) 1977-05-25

Family

ID=15232617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13889575A Pending JPS5263059A (en) 1975-11-19 1975-11-19 Method of measuring response characteristic of detector in scanning ty pe electronic microscope

Country Status (1)

Country Link
JP (1) JPS5263059A (ja)

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