JPS5254371A - Liquid phase epitaxial growth method - Google Patents
Liquid phase epitaxial growth methodInfo
- Publication number
- JPS5254371A JPS5254371A JP12984675A JP12984675A JPS5254371A JP S5254371 A JPS5254371 A JP S5254371A JP 12984675 A JP12984675 A JP 12984675A JP 12984675 A JP12984675 A JP 12984675A JP S5254371 A JPS5254371 A JP S5254371A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- phase epitaxial
- epitaxial growth
- growth method
- compositions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Semiconductor Lasers (AREA)
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain a semiconductor device such as semiconductor laser with a lower threshold value and longer service life by controlling the changes in the compositions between layers having varying compositions, in a method of forming multilayer liquid phase epitaxial wafer of GaAs Al Ga As bases.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12984675A JPS5254371A (en) | 1975-10-30 | 1975-10-30 | Liquid phase epitaxial growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12984675A JPS5254371A (en) | 1975-10-30 | 1975-10-30 | Liquid phase epitaxial growth method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5254371A true JPS5254371A (en) | 1977-05-02 |
JPS5441391B2 JPS5441391B2 (en) | 1979-12-07 |
Family
ID=15019672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12984675A Granted JPS5254371A (en) | 1975-10-30 | 1975-10-30 | Liquid phase epitaxial growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5254371A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4934275A (en) * | 1972-07-28 | 1974-03-29 | ||
JPS5210073A (en) * | 1975-07-14 | 1977-01-26 | Sharp Corp | Equipment for liquid phase epitaxial growth |
-
1975
- 1975-10-30 JP JP12984675A patent/JPS5254371A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4934275A (en) * | 1972-07-28 | 1974-03-29 | ||
JPS5210073A (en) * | 1975-07-14 | 1977-01-26 | Sharp Corp | Equipment for liquid phase epitaxial growth |
Also Published As
Publication number | Publication date |
---|---|
JPS5441391B2 (en) | 1979-12-07 |
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