JPS5252366A - Improvement of crystallinity of semiconductor crystals - Google Patents
Improvement of crystallinity of semiconductor crystalsInfo
- Publication number
- JPS5252366A JPS5252366A JP12875675A JP12875675A JPS5252366A JP S5252366 A JPS5252366 A JP S5252366A JP 12875675 A JP12875675 A JP 12875675A JP 12875675 A JP12875675 A JP 12875675A JP S5252366 A JPS5252366 A JP S5252366A
- Authority
- JP
- Japan
- Prior art keywords
- crystallinity
- improvement
- semiconductor crystals
- layer
- implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To improve quality of crystalline, epitaxial layer of III-V compound semiconductors by ion-implantation of constituent atoms into the layer.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12875675A JPS5850408B2 (en) | 1975-10-24 | 1975-10-24 | How to use hand-held equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12875675A JPS5850408B2 (en) | 1975-10-24 | 1975-10-24 | How to use hand-held equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5252366A true JPS5252366A (en) | 1977-04-27 |
JPS5850408B2 JPS5850408B2 (en) | 1983-11-10 |
Family
ID=14992677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12875675A Expired JPS5850408B2 (en) | 1975-10-24 | 1975-10-24 | How to use hand-held equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5850408B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6216522A (en) * | 1985-07-16 | 1987-01-24 | Matsushita Electric Ind Co Ltd | Treating method for semiconductor device |
JPS6411315A (en) * | 1987-07-06 | 1989-01-13 | Nec Corp | Semiconductor film growth method |
-
1975
- 1975-10-24 JP JP12875675A patent/JPS5850408B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6216522A (en) * | 1985-07-16 | 1987-01-24 | Matsushita Electric Ind Co Ltd | Treating method for semiconductor device |
JPS6411315A (en) * | 1987-07-06 | 1989-01-13 | Nec Corp | Semiconductor film growth method |
Also Published As
Publication number | Publication date |
---|---|
JPS5850408B2 (en) | 1983-11-10 |
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