JPS5252366A - Improvement of crystallinity of semiconductor crystals - Google Patents

Improvement of crystallinity of semiconductor crystals

Info

Publication number
JPS5252366A
JPS5252366A JP12875675A JP12875675A JPS5252366A JP S5252366 A JPS5252366 A JP S5252366A JP 12875675 A JP12875675 A JP 12875675A JP 12875675 A JP12875675 A JP 12875675A JP S5252366 A JPS5252366 A JP S5252366A
Authority
JP
Japan
Prior art keywords
crystallinity
improvement
semiconductor crystals
layer
implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12875675A
Other languages
Japanese (ja)
Other versions
JPS5850408B2 (en
Inventor
Yukio Toyoda
Yoshimasa Oki
Isamu Akasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12875675A priority Critical patent/JPS5850408B2/en
Publication of JPS5252366A publication Critical patent/JPS5252366A/en
Publication of JPS5850408B2 publication Critical patent/JPS5850408B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To improve quality of crystalline, epitaxial layer of III-V compound semiconductors by ion-implantation of constituent atoms into the layer.
COPYRIGHT: (C)1977,JPO&Japio
JP12875675A 1975-10-24 1975-10-24 How to use hand-held equipment Expired JPS5850408B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12875675A JPS5850408B2 (en) 1975-10-24 1975-10-24 How to use hand-held equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12875675A JPS5850408B2 (en) 1975-10-24 1975-10-24 How to use hand-held equipment

Publications (2)

Publication Number Publication Date
JPS5252366A true JPS5252366A (en) 1977-04-27
JPS5850408B2 JPS5850408B2 (en) 1983-11-10

Family

ID=14992677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12875675A Expired JPS5850408B2 (en) 1975-10-24 1975-10-24 How to use hand-held equipment

Country Status (1)

Country Link
JP (1) JPS5850408B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6216522A (en) * 1985-07-16 1987-01-24 Matsushita Electric Ind Co Ltd Treating method for semiconductor device
JPS6411315A (en) * 1987-07-06 1989-01-13 Nec Corp Semiconductor film growth method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6216522A (en) * 1985-07-16 1987-01-24 Matsushita Electric Ind Co Ltd Treating method for semiconductor device
JPS6411315A (en) * 1987-07-06 1989-01-13 Nec Corp Semiconductor film growth method

Also Published As

Publication number Publication date
JPS5850408B2 (en) 1983-11-10

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