JPS5247688A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5247688A
JPS5247688A JP12390975A JP12390975A JPS5247688A JP S5247688 A JPS5247688 A JP S5247688A JP 12390975 A JP12390975 A JP 12390975A JP 12390975 A JP12390975 A JP 12390975A JP S5247688 A JPS5247688 A JP S5247688A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
plating
prevented
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12390975A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5731661B2 (enExample
Inventor
Masaru Nakamura
Shigeru Ozora
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12390975A priority Critical patent/JPS5247688A/ja
Publication of JPS5247688A publication Critical patent/JPS5247688A/ja
Publication of JPS5731661B2 publication Critical patent/JPS5731661B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
JP12390975A 1975-10-15 1975-10-15 Process for production of semiconductor device Granted JPS5247688A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12390975A JPS5247688A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12390975A JPS5247688A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5247688A true JPS5247688A (en) 1977-04-15
JPS5731661B2 JPS5731661B2 (enExample) 1982-07-06

Family

ID=14872332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12390975A Granted JPS5247688A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5247688A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582044A (ja) * 1981-06-26 1983-01-07 Seiko Epson Corp 半導体装置の製造方法
JPH023228A (ja) * 1987-12-28 1990-01-08 Texas Instr Inc <Ti> 平坦化せれた、選択的なタングステン金属処理層システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582044A (ja) * 1981-06-26 1983-01-07 Seiko Epson Corp 半導体装置の製造方法
JPH023228A (ja) * 1987-12-28 1990-01-08 Texas Instr Inc <Ti> 平坦化せれた、選択的なタングステン金属処理層システム

Also Published As

Publication number Publication date
JPS5731661B2 (enExample) 1982-07-06

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