JPS5239379A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5239379A
JPS5239379A JP50115750A JP11575075A JPS5239379A JP S5239379 A JPS5239379 A JP S5239379A JP 50115750 A JP50115750 A JP 50115750A JP 11575075 A JP11575075 A JP 11575075A JP S5239379 A JPS5239379 A JP S5239379A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
diffusion
impurities
kinds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50115750A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5643667B2 (enrdf_load_stackoverflow
Inventor
Kei Kirita
Takahiko Moriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50115750A priority Critical patent/JPS5239379A/ja
Publication of JPS5239379A publication Critical patent/JPS5239379A/ja
Publication of JPS5643667B2 publication Critical patent/JPS5643667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Non-Volatile Memory (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP50115750A 1975-09-25 1975-09-25 Process for production of semiconductor device Granted JPS5239379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50115750A JPS5239379A (en) 1975-09-25 1975-09-25 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50115750A JPS5239379A (en) 1975-09-25 1975-09-25 Process for production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5239379A true JPS5239379A (en) 1977-03-26
JPS5643667B2 JPS5643667B2 (enrdf_load_stackoverflow) 1981-10-14

Family

ID=14670117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50115750A Granted JPS5239379A (en) 1975-09-25 1975-09-25 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5239379A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56103464A (en) * 1979-12-27 1981-08-18 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56103464A (en) * 1979-12-27 1981-08-18 Fujitsu Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5643667B2 (enrdf_load_stackoverflow) 1981-10-14

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