JPS5249777A - Process for production of field effect transistor - Google Patents

Process for production of field effect transistor

Info

Publication number
JPS5249777A
JPS5249777A JP12603875A JP12603875A JPS5249777A JP S5249777 A JPS5249777 A JP S5249777A JP 12603875 A JP12603875 A JP 12603875A JP 12603875 A JP12603875 A JP 12603875A JP S5249777 A JPS5249777 A JP S5249777A
Authority
JP
Japan
Prior art keywords
production
field effect
effect transistor
gate
reduce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12603875A
Other languages
Japanese (ja)
Other versions
JPS5742230B2 (en
Inventor
Yasunari Kajiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12603875A priority Critical patent/JPS5249777A/en
Publication of JPS5249777A publication Critical patent/JPS5249777A/en
Publication of JPS5742230B2 publication Critical patent/JPS5742230B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To make an FET of superior high frequency characteristics by providing a poly Si layer in gate part to shorten gate length, reduce source resistance and reduce gate resistance as well.
COPYRIGHT: (C)1977,JPO&Japio
JP12603875A 1975-10-20 1975-10-20 Process for production of field effect transistor Granted JPS5249777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12603875A JPS5249777A (en) 1975-10-20 1975-10-20 Process for production of field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12603875A JPS5249777A (en) 1975-10-20 1975-10-20 Process for production of field effect transistor

Publications (2)

Publication Number Publication Date
JPS5249777A true JPS5249777A (en) 1977-04-21
JPS5742230B2 JPS5742230B2 (en) 1982-09-07

Family

ID=14925119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12603875A Granted JPS5249777A (en) 1975-10-20 1975-10-20 Process for production of field effect transistor

Country Status (1)

Country Link
JP (1) JPS5249777A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626474A (en) * 1979-08-13 1981-03-14 Hitachi Ltd Junction type field effect semiconductor device
JPS60152069A (en) * 1984-01-20 1985-08-10 Toshiba Corp Semiconductor device
JPH01286469A (en) * 1988-05-13 1989-11-17 Nec Corp Manufacture of junction type field effect transistor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626474A (en) * 1979-08-13 1981-03-14 Hitachi Ltd Junction type field effect semiconductor device
JPS60152069A (en) * 1984-01-20 1985-08-10 Toshiba Corp Semiconductor device
JPH01286469A (en) * 1988-05-13 1989-11-17 Nec Corp Manufacture of junction type field effect transistor

Also Published As

Publication number Publication date
JPS5742230B2 (en) 1982-09-07

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