JPS5239369A - Method for fabrication of semiconductor substrate - Google Patents

Method for fabrication of semiconductor substrate

Info

Publication number
JPS5239369A
JPS5239369A JP11538775A JP11538775A JPS5239369A JP S5239369 A JPS5239369 A JP S5239369A JP 11538775 A JP11538775 A JP 11538775A JP 11538775 A JP11538775 A JP 11538775A JP S5239369 A JPS5239369 A JP S5239369A
Authority
JP
Japan
Prior art keywords
fabrication
semiconductor substrate
precisely
ion injection
injection technique
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11538775A
Other languages
Japanese (ja)
Inventor
Katsutoshi Izumi
Masanobu Doken
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP11538775A priority Critical patent/JPS5239369A/en
Publication of JPS5239369A publication Critical patent/JPS5239369A/en
Pending legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: To control resistivity precisely by applying ion injection technique.
COPYRIGHT: (C)1977,JPO&Japio
JP11538775A 1975-09-23 1975-09-23 Method for fabrication of semiconductor substrate Pending JPS5239369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11538775A JPS5239369A (en) 1975-09-23 1975-09-23 Method for fabrication of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11538775A JPS5239369A (en) 1975-09-23 1975-09-23 Method for fabrication of semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS5239369A true JPS5239369A (en) 1977-03-26

Family

ID=14661271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11538775A Pending JPS5239369A (en) 1975-09-23 1975-09-23 Method for fabrication of semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5239369A (en)

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