JPS5432070A - Etching process method for semiconductor element - Google Patents
Etching process method for semiconductor elementInfo
- Publication number
- JPS5432070A JPS5432070A JP9800677A JP9800677A JPS5432070A JP S5432070 A JPS5432070 A JP S5432070A JP 9800677 A JP9800677 A JP 9800677A JP 9800677 A JP9800677 A JP 9800677A JP S5432070 A JPS5432070 A JP S5432070A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- etching process
- process method
- educe
- liable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To prevent the metallic substance which is liable to stick and educe onto the surface of the semiconductor element, by applying the electric field to the semiconductor element via the conductive jig when an etching process is carried out.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9800677A JPS5432070A (en) | 1977-08-15 | 1977-08-15 | Etching process method for semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9800677A JPS5432070A (en) | 1977-08-15 | 1977-08-15 | Etching process method for semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5432070A true JPS5432070A (en) | 1979-03-09 |
Family
ID=14207624
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9800677A Pending JPS5432070A (en) | 1977-08-15 | 1977-08-15 | Etching process method for semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5432070A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58893A (en) * | 1981-06-25 | 1983-01-06 | Ajinomoto Co Inc | Preparation of l-isoleucine by fermentation |
US7781191B2 (en) | 2005-04-12 | 2010-08-24 | E. I. Du Pont De Nemours And Company | Treatment of biomass to obtain a target chemical |
US7807419B2 (en) | 2007-08-22 | 2010-10-05 | E. I. Du Pont De Nemours And Company | Process for concentrated biomass saccharification |
US7819976B2 (en) | 2007-08-22 | 2010-10-26 | E. I. Du Pont De Nemours And Company | Biomass treatment method |
US7910338B2 (en) | 2005-04-12 | 2011-03-22 | E. I. Du Pont De Nemours And Company | Integration of alternative feedstreams for biomass treatment and utilization |
US8445236B2 (en) | 2007-08-22 | 2013-05-21 | Alliance For Sustainable Energy Llc | Biomass pretreatment |
US8512979B2 (en) | 2005-04-12 | 2013-08-20 | E I Du Pont De Nemours And Company | System and process for biomass treatment |
US10227623B2 (en) | 2013-11-24 | 2019-03-12 | E I Du Pont De Nemours And Company | High force and high stress destructuring of cellulosic biomass |
-
1977
- 1977-08-15 JP JP9800677A patent/JPS5432070A/en active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58893A (en) * | 1981-06-25 | 1983-01-06 | Ajinomoto Co Inc | Preparation of l-isoleucine by fermentation |
JPH0353913B2 (en) * | 1981-06-25 | 1991-08-16 | ||
US7781191B2 (en) | 2005-04-12 | 2010-08-24 | E. I. Du Pont De Nemours And Company | Treatment of biomass to obtain a target chemical |
US7910338B2 (en) | 2005-04-12 | 2011-03-22 | E. I. Du Pont De Nemours And Company | Integration of alternative feedstreams for biomass treatment and utilization |
US7932063B2 (en) | 2005-04-12 | 2011-04-26 | E. I. Du Pont De Nemours And Company | Treatment of biomass to obtain fermentable sugars |
US7998713B2 (en) | 2005-04-12 | 2011-08-16 | E. I. Du Pont De Nemours And Company | Treatment of biomass to obtain ethanol |
US8512979B2 (en) | 2005-04-12 | 2013-08-20 | E I Du Pont De Nemours And Company | System and process for biomass treatment |
US7807419B2 (en) | 2007-08-22 | 2010-10-05 | E. I. Du Pont De Nemours And Company | Process for concentrated biomass saccharification |
US7819976B2 (en) | 2007-08-22 | 2010-10-26 | E. I. Du Pont De Nemours And Company | Biomass treatment method |
US8445236B2 (en) | 2007-08-22 | 2013-05-21 | Alliance For Sustainable Energy Llc | Biomass pretreatment |
US10227623B2 (en) | 2013-11-24 | 2019-03-12 | E I Du Pont De Nemours And Company | High force and high stress destructuring of cellulosic biomass |
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