JPS5432070A - Etching process method for semiconductor element - Google Patents

Etching process method for semiconductor element

Info

Publication number
JPS5432070A
JPS5432070A JP9800677A JP9800677A JPS5432070A JP S5432070 A JPS5432070 A JP S5432070A JP 9800677 A JP9800677 A JP 9800677A JP 9800677 A JP9800677 A JP 9800677A JP S5432070 A JPS5432070 A JP S5432070A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
semiconductor element
etching process
process method
educe
liable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9800677A
Inventor
Motofumi Miyazaki
Yukiyasu Usunaga
Original Assignee
Nec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To prevent the metallic substance which is liable to stick and educe onto the surface of the semiconductor element, by applying the electric field to the semiconductor element via the conductive jig when an etching process is carried out.
COPYRIGHT: (C)1979,JPO&Japio
JP9800677A 1977-08-15 1977-08-15 Etching process method for semiconductor element Pending JPS5432070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9800677A JPS5432070A (en) 1977-08-15 1977-08-15 Etching process method for semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9800677A JPS5432070A (en) 1977-08-15 1977-08-15 Etching process method for semiconductor element

Publications (1)

Publication Number Publication Date
JPS5432070A true true JPS5432070A (en) 1979-03-09

Family

ID=14207624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9800677A Pending JPS5432070A (en) 1977-08-15 1977-08-15 Etching process method for semiconductor element

Country Status (1)

Country Link
JP (1) JPS5432070A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58893A (en) * 1981-06-25 1983-01-06 Ajinomoto Co Inc Preparation of l-isoleucine by fermentation
US7781191B2 (en) 2005-04-12 2010-08-24 E. I. Du Pont De Nemours And Company Treatment of biomass to obtain a target chemical
US7807419B2 (en) 2007-08-22 2010-10-05 E. I. Du Pont De Nemours And Company Process for concentrated biomass saccharification
US7819976B2 (en) 2007-08-22 2010-10-26 E. I. Du Pont De Nemours And Company Biomass treatment method
US7910338B2 (en) 2005-04-12 2011-03-22 E. I. Du Pont De Nemours And Company Integration of alternative feedstreams for biomass treatment and utilization
US8445236B2 (en) 2007-08-22 2013-05-21 Alliance For Sustainable Energy Llc Biomass pretreatment
US8512979B2 (en) 2005-04-12 2013-08-20 E I Du Pont De Nemours And Company System and process for biomass treatment

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58893A (en) * 1981-06-25 1983-01-06 Ajinomoto Co Inc Preparation of l-isoleucine by fermentation
JPH0353913B2 (en) * 1981-06-25 1991-08-16
US7781191B2 (en) 2005-04-12 2010-08-24 E. I. Du Pont De Nemours And Company Treatment of biomass to obtain a target chemical
US8512979B2 (en) 2005-04-12 2013-08-20 E I Du Pont De Nemours And Company System and process for biomass treatment
US7910338B2 (en) 2005-04-12 2011-03-22 E. I. Du Pont De Nemours And Company Integration of alternative feedstreams for biomass treatment and utilization
US7932063B2 (en) 2005-04-12 2011-04-26 E. I. Du Pont De Nemours And Company Treatment of biomass to obtain fermentable sugars
US7998713B2 (en) 2005-04-12 2011-08-16 E. I. Du Pont De Nemours And Company Treatment of biomass to obtain ethanol
US7819976B2 (en) 2007-08-22 2010-10-26 E. I. Du Pont De Nemours And Company Biomass treatment method
US8445236B2 (en) 2007-08-22 2013-05-21 Alliance For Sustainable Energy Llc Biomass pretreatment
US7807419B2 (en) 2007-08-22 2010-10-05 E. I. Du Pont De Nemours And Company Process for concentrated biomass saccharification

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