JPS5226882A - Apparatus for direct measurement of substrate temperatures - Google Patents
Apparatus for direct measurement of substrate temperaturesInfo
- Publication number
- JPS5226882A JPS5226882A JP10255475A JP10255475A JPS5226882A JP S5226882 A JPS5226882 A JP S5226882A JP 10255475 A JP10255475 A JP 10255475A JP 10255475 A JP10255475 A JP 10255475A JP S5226882 A JPS5226882 A JP S5226882A
- Authority
- JP
- Japan
- Prior art keywords
- direct measurement
- substrate temperatures
- high frequency
- temperatures
- frequency voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE: An apparatus capable of making direct measurement of substrate temperatures while removing adverse influence by high frequency voltage induction, in ion plating or spattering apparatus.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10255475A JPS5226882A (en) | 1975-08-26 | 1975-08-26 | Apparatus for direct measurement of substrate temperatures |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10255475A JPS5226882A (en) | 1975-08-26 | 1975-08-26 | Apparatus for direct measurement of substrate temperatures |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5226882A true JPS5226882A (en) | 1977-02-28 |
JPS5547803B2 JPS5547803B2 (en) | 1980-12-02 |
Family
ID=14330451
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10255475A Granted JPS5226882A (en) | 1975-08-26 | 1975-08-26 | Apparatus for direct measurement of substrate temperatures |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5226882A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61294320A (en) * | 1985-06-24 | 1986-12-25 | Sumitomo Electric Ind Ltd | Method and instrument for measuring substrate temperature |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0426097Y2 (en) * | 1985-04-22 | 1992-06-23 |
-
1975
- 1975-08-26 JP JP10255475A patent/JPS5226882A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61294320A (en) * | 1985-06-24 | 1986-12-25 | Sumitomo Electric Ind Ltd | Method and instrument for measuring substrate temperature |
Also Published As
Publication number | Publication date |
---|---|
JPS5547803B2 (en) | 1980-12-02 |
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