JPS5226882A - Apparatus for direct measurement of substrate temperatures - Google Patents

Apparatus for direct measurement of substrate temperatures

Info

Publication number
JPS5226882A
JPS5226882A JP10255475A JP10255475A JPS5226882A JP S5226882 A JPS5226882 A JP S5226882A JP 10255475 A JP10255475 A JP 10255475A JP 10255475 A JP10255475 A JP 10255475A JP S5226882 A JPS5226882 A JP S5226882A
Authority
JP
Japan
Prior art keywords
direct measurement
substrate temperatures
high frequency
temperatures
frequency voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10255475A
Other languages
Japanese (ja)
Other versions
JPS5547803B2 (en
Inventor
Hisao Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP10255475A priority Critical patent/JPS5226882A/en
Publication of JPS5226882A publication Critical patent/JPS5226882A/en
Publication of JPS5547803B2 publication Critical patent/JPS5547803B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: An apparatus capable of making direct measurement of substrate temperatures while removing adverse influence by high frequency voltage induction, in ion plating or spattering apparatus.
COPYRIGHT: (C)1977,JPO&Japio
JP10255475A 1975-08-26 1975-08-26 Apparatus for direct measurement of substrate temperatures Granted JPS5226882A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10255475A JPS5226882A (en) 1975-08-26 1975-08-26 Apparatus for direct measurement of substrate temperatures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10255475A JPS5226882A (en) 1975-08-26 1975-08-26 Apparatus for direct measurement of substrate temperatures

Publications (2)

Publication Number Publication Date
JPS5226882A true JPS5226882A (en) 1977-02-28
JPS5547803B2 JPS5547803B2 (en) 1980-12-02

Family

ID=14330451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10255475A Granted JPS5226882A (en) 1975-08-26 1975-08-26 Apparatus for direct measurement of substrate temperatures

Country Status (1)

Country Link
JP (1) JPS5226882A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61294320A (en) * 1985-06-24 1986-12-25 Sumitomo Electric Ind Ltd Method and instrument for measuring substrate temperature

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0426097Y2 (en) * 1985-04-22 1992-06-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61294320A (en) * 1985-06-24 1986-12-25 Sumitomo Electric Ind Ltd Method and instrument for measuring substrate temperature

Also Published As

Publication number Publication date
JPS5547803B2 (en) 1980-12-02

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