JPS5224471A - Junction field effect transistor and its process - Google Patents
Junction field effect transistor and its processInfo
- Publication number
- JPS5224471A JPS5224471A JP10084575A JP10084575A JPS5224471A JP S5224471 A JPS5224471 A JP S5224471A JP 10084575 A JP10084575 A JP 10084575A JP 10084575 A JP10084575 A JP 10084575A JP S5224471 A JPS5224471 A JP S5224471A
- Authority
- JP
- Japan
- Prior art keywords
- field effect
- effect transistor
- junction field
- gate
- junction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: In J FET having Gals-GaAlAs hereto junction, utilizing difference in errosion speed in crystal direction, gate length and distances between gate and source and drain and each electrode are shortened.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50100845A JPS584830B2 (en) | 1975-08-19 | 1975-08-19 | Manufacturing method of junction field effect transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50100845A JPS584830B2 (en) | 1975-08-19 | 1975-08-19 | Manufacturing method of junction field effect transistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5224471A true JPS5224471A (en) | 1977-02-23 |
JPS584830B2 JPS584830B2 (en) | 1983-01-27 |
Family
ID=14284643
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50100845A Expired JPS584830B2 (en) | 1975-08-19 | 1975-08-19 | Manufacturing method of junction field effect transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS584830B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63293830A (en) * | 1987-05-26 | 1988-11-30 | Nec Corp | Etching method for semiconductor crystal |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS509378A (en) * | 1973-05-23 | 1975-01-30 |
-
1975
- 1975-08-19 JP JP50100845A patent/JPS584830B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS509378A (en) * | 1973-05-23 | 1975-01-30 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63293830A (en) * | 1987-05-26 | 1988-11-30 | Nec Corp | Etching method for semiconductor crystal |
Also Published As
Publication number | Publication date |
---|---|
JPS584830B2 (en) | 1983-01-27 |
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