JPS5222882A - Vacuum tight printing unit - Google Patents
Vacuum tight printing unitInfo
- Publication number
- JPS5222882A JPS5222882A JP9897775A JP9897775A JPS5222882A JP S5222882 A JPS5222882 A JP S5222882A JP 9897775 A JP9897775 A JP 9897775A JP 9897775 A JP9897775 A JP 9897775A JP S5222882 A JPS5222882 A JP S5222882A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum tight
- printing unit
- tight printing
- copy
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: In a vacuum tight unit which is used to accurately copy an element pattern on the copy sample such as silicon wafer or photo mask plate, to prevent a partial tightening error generated tetween a reference photo and copy sample.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9897775A JPS5222882A (en) | 1975-08-14 | 1975-08-14 | Vacuum tight printing unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9897775A JPS5222882A (en) | 1975-08-14 | 1975-08-14 | Vacuum tight printing unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5222882A true JPS5222882A (en) | 1977-02-21 |
Family
ID=14234070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9897775A Pending JPS5222882A (en) | 1975-08-14 | 1975-08-14 | Vacuum tight printing unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5222882A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55110246A (en) * | 1979-02-19 | 1980-08-25 | Fujitsu Ltd | Production of photomask |
JPS6219855A (en) * | 1985-07-19 | 1987-01-28 | Hitachi Ltd | Exposing device |
-
1975
- 1975-08-14 JP JP9897775A patent/JPS5222882A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55110246A (en) * | 1979-02-19 | 1980-08-25 | Fujitsu Ltd | Production of photomask |
JPS6219855A (en) * | 1985-07-19 | 1987-01-28 | Hitachi Ltd | Exposing device |
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