JPS5222882A - Vacuum tight printing unit - Google Patents

Vacuum tight printing unit

Info

Publication number
JPS5222882A
JPS5222882A JP9897775A JP9897775A JPS5222882A JP S5222882 A JPS5222882 A JP S5222882A JP 9897775 A JP9897775 A JP 9897775A JP 9897775 A JP9897775 A JP 9897775A JP S5222882 A JPS5222882 A JP S5222882A
Authority
JP
Japan
Prior art keywords
vacuum tight
printing unit
tight printing
copy
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9897775A
Other languages
Japanese (ja)
Inventor
Ikuo Iwama
Tsuneo Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9897775A priority Critical patent/JPS5222882A/en
Publication of JPS5222882A publication Critical patent/JPS5222882A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: In a vacuum tight unit which is used to accurately copy an element pattern on the copy sample such as silicon wafer or photo mask plate, to prevent a partial tightening error generated tetween a reference photo and copy sample.
COPYRIGHT: (C)1977,JPO&Japio
JP9897775A 1975-08-14 1975-08-14 Vacuum tight printing unit Pending JPS5222882A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9897775A JPS5222882A (en) 1975-08-14 1975-08-14 Vacuum tight printing unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9897775A JPS5222882A (en) 1975-08-14 1975-08-14 Vacuum tight printing unit

Publications (1)

Publication Number Publication Date
JPS5222882A true JPS5222882A (en) 1977-02-21

Family

ID=14234070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9897775A Pending JPS5222882A (en) 1975-08-14 1975-08-14 Vacuum tight printing unit

Country Status (1)

Country Link
JP (1) JPS5222882A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110246A (en) * 1979-02-19 1980-08-25 Fujitsu Ltd Production of photomask
JPS6219855A (en) * 1985-07-19 1987-01-28 Hitachi Ltd Exposing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110246A (en) * 1979-02-19 1980-08-25 Fujitsu Ltd Production of photomask
JPS6219855A (en) * 1985-07-19 1987-01-28 Hitachi Ltd Exposing device

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