JPS52156552A - Wafer inspection apparatus - Google Patents

Wafer inspection apparatus

Info

Publication number
JPS52156552A
JPS52156552A JP7318176A JP7318176A JPS52156552A JP S52156552 A JPS52156552 A JP S52156552A JP 7318176 A JP7318176 A JP 7318176A JP 7318176 A JP7318176 A JP 7318176A JP S52156552 A JPS52156552 A JP S52156552A
Authority
JP
Japan
Prior art keywords
wafer inspection
inspection apparatus
sheet
workability
unloading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7318176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6118337B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Nashihara
Hiroshi Maejima
Tetsuya Takagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7318176A priority Critical patent/JPS52156552A/ja
Publication of JPS52156552A publication Critical patent/JPS52156552A/ja
Publication of JPS6118337B2 publication Critical patent/JPS6118337B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP7318176A 1976-06-23 1976-06-23 Wafer inspection apparatus Granted JPS52156552A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7318176A JPS52156552A (en) 1976-06-23 1976-06-23 Wafer inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7318176A JPS52156552A (en) 1976-06-23 1976-06-23 Wafer inspection apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP856784A Division JPS59139642A (ja) 1984-01-23 1984-01-23 ウエ−ハ検査装置

Publications (2)

Publication Number Publication Date
JPS52156552A true JPS52156552A (en) 1977-12-27
JPS6118337B2 JPS6118337B2 (enrdf_load_stackoverflow) 1986-05-12

Family

ID=13510703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7318176A Granted JPS52156552A (en) 1976-06-23 1976-06-23 Wafer inspection apparatus

Country Status (1)

Country Link
JP (1) JPS52156552A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5757104A (en) * 1980-09-24 1982-04-06 Hitachi Ltd Plate-shaped work automatic feeding holding equipment
JPS59188652A (ja) * 1983-02-28 1984-10-26 タマラツク・サイエンテイフイツク・カンパニ−・インコ−ポレ−テツド 両面印刷回路盤を露出および処理する自動システム
JPS62133546U (enrdf_load_stackoverflow) * 1986-02-17 1987-08-22

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5757104A (en) * 1980-09-24 1982-04-06 Hitachi Ltd Plate-shaped work automatic feeding holding equipment
JPS59188652A (ja) * 1983-02-28 1984-10-26 タマラツク・サイエンテイフイツク・カンパニ−・インコ−ポレ−テツド 両面印刷回路盤を露出および処理する自動システム
JPS62133546U (enrdf_load_stackoverflow) * 1986-02-17 1987-08-22

Also Published As

Publication number Publication date
JPS6118337B2 (enrdf_load_stackoverflow) 1986-05-12

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