JPS6118337B2 - - Google Patents
Info
- Publication number
- JPS6118337B2 JPS6118337B2 JP7318176A JP7318176A JPS6118337B2 JP S6118337 B2 JPS6118337 B2 JP S6118337B2 JP 7318176 A JP7318176 A JP 7318176A JP 7318176 A JP7318176 A JP 7318176A JP S6118337 B2 JPS6118337 B2 JP S6118337B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- section
- wafers
- inspection
- unloader
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 136
- 238000007689 inspection Methods 0.000 claims description 44
- 238000012546 transfer Methods 0.000 claims description 21
- 230000007723 transport mechanism Effects 0.000 description 20
- 230000007246 mechanism Effects 0.000 description 16
- 239000000523 sample Substances 0.000 description 13
- 230000002950 deficient Effects 0.000 description 9
- 238000005070 sampling Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7318176A JPS52156552A (en) | 1976-06-23 | 1976-06-23 | Wafer inspection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7318176A JPS52156552A (en) | 1976-06-23 | 1976-06-23 | Wafer inspection apparatus |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP856784A Division JPS59139642A (ja) | 1984-01-23 | 1984-01-23 | ウエ−ハ検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52156552A JPS52156552A (en) | 1977-12-27 |
| JPS6118337B2 true JPS6118337B2 (enrdf_load_stackoverflow) | 1986-05-12 |
Family
ID=13510703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7318176A Granted JPS52156552A (en) | 1976-06-23 | 1976-06-23 | Wafer inspection apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52156552A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5757104A (en) * | 1980-09-24 | 1982-04-06 | Hitachi Ltd | Plate-shaped work automatic feeding holding equipment |
| US4539479A (en) * | 1983-02-28 | 1985-09-03 | Sheets Ronald E | Automatic apparatus and method for exposing, registering, and handling double-sided printed circuit boards |
| JPH0423858Y2 (enrdf_load_stackoverflow) * | 1986-02-17 | 1992-06-04 |
-
1976
- 1976-06-23 JP JP7318176A patent/JPS52156552A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52156552A (en) | 1977-12-27 |
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