JPS52154367A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52154367A
JPS52154367A JP7143676A JP7143676A JPS52154367A JP S52154367 A JPS52154367 A JP S52154367A JP 7143676 A JP7143676 A JP 7143676A JP 7143676 A JP7143676 A JP 7143676A JP S52154367 A JPS52154367 A JP S52154367A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
films
pattern
reduce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7143676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5723424B2 (cs
Inventor
Mikio Takagi
Minoru Matsumoto
Hajime Kamioka
Akira Fujinuma
Shuichi Miyamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7143676A priority Critical patent/JPS52154367A/ja
Publication of JPS52154367A publication Critical patent/JPS52154367A/ja
Publication of JPS5723424B2 publication Critical patent/JPS5723424B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP7143676A 1976-06-17 1976-06-17 Production of semiconductor device Granted JPS52154367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7143676A JPS52154367A (en) 1976-06-17 1976-06-17 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7143676A JPS52154367A (en) 1976-06-17 1976-06-17 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52154367A true JPS52154367A (en) 1977-12-22
JPS5723424B2 JPS5723424B2 (cs) 1982-05-18

Family

ID=13460474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7143676A Granted JPS52154367A (en) 1976-06-17 1976-06-17 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52154367A (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54102979A (en) * 1978-01-31 1979-08-13 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS54148477A (en) * 1978-05-15 1979-11-20 Nec Corp Manufacture of semiconductor device
JPS55138839A (en) * 1979-04-17 1980-10-30 Nec Kyushu Ltd Method of fabricating semiconductor device
JPS5854677A (ja) * 1981-09-28 1983-03-31 Nec Corp 半導体装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54102979A (en) * 1978-01-31 1979-08-13 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS54148477A (en) * 1978-05-15 1979-11-20 Nec Corp Manufacture of semiconductor device
JPS55138839A (en) * 1979-04-17 1980-10-30 Nec Kyushu Ltd Method of fabricating semiconductor device
JPS5854677A (ja) * 1981-09-28 1983-03-31 Nec Corp 半導体装置

Also Published As

Publication number Publication date
JPS5723424B2 (cs) 1982-05-18

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