JPS52147069A - Production of high quality masks - Google Patents
Production of high quality masksInfo
- Publication number
- JPS52147069A JPS52147069A JP6292776A JP6292776A JPS52147069A JP S52147069 A JPS52147069 A JP S52147069A JP 6292776 A JP6292776 A JP 6292776A JP 6292776 A JP6292776 A JP 6292776A JP S52147069 A JPS52147069 A JP S52147069A
- Authority
- JP
- Japan
- Prior art keywords
- production
- high quality
- quality masks
- masks
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
PURPOSE: To produce a defect-free master mask within a short time by using plural intermediate negatives and performing lapped exposure.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6292776A JPS52147069A (en) | 1976-06-01 | 1976-06-01 | Production of high quality masks |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6292776A JPS52147069A (en) | 1976-06-01 | 1976-06-01 | Production of high quality masks |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52147069A true JPS52147069A (en) | 1977-12-07 |
JPS565057B2 JPS565057B2 (en) | 1981-02-03 |
Family
ID=13214390
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6292776A Granted JPS52147069A (en) | 1976-06-01 | 1976-06-01 | Production of high quality masks |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52147069A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS501805A (en) * | 1973-05-14 | 1975-01-09 | ||
JPS5011666A (en) * | 1973-06-01 | 1975-02-06 | ||
JPS5160455A (en) * | 1974-11-22 | 1976-05-26 | Tokyo Shibaura Electric Co |
-
1976
- 1976-06-01 JP JP6292776A patent/JPS52147069A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS501805A (en) * | 1973-05-14 | 1975-01-09 | ||
JPS5011666A (en) * | 1973-06-01 | 1975-02-06 | ||
JPS5160455A (en) * | 1974-11-22 | 1976-05-26 | Tokyo Shibaura Electric Co |
Also Published As
Publication number | Publication date |
---|---|
JPS565057B2 (en) | 1981-02-03 |
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