JPS52147069A - Production of high quality masks - Google Patents

Production of high quality masks

Info

Publication number
JPS52147069A
JPS52147069A JP6292776A JP6292776A JPS52147069A JP S52147069 A JPS52147069 A JP S52147069A JP 6292776 A JP6292776 A JP 6292776A JP 6292776 A JP6292776 A JP 6292776A JP S52147069 A JPS52147069 A JP S52147069A
Authority
JP
Japan
Prior art keywords
production
high quality
quality masks
masks
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6292776A
Other languages
Japanese (ja)
Other versions
JPS565057B2 (en
Inventor
Hiroshi Otsuka
Hideo Nagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP6292776A priority Critical patent/JPS52147069A/en
Publication of JPS52147069A publication Critical patent/JPS52147069A/en
Publication of JPS565057B2 publication Critical patent/JPS565057B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To produce a defect-free master mask within a short time by using plural intermediate negatives and performing lapped exposure.
COPYRIGHT: (C)1977,JPO&Japio
JP6292776A 1976-06-01 1976-06-01 Production of high quality masks Granted JPS52147069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6292776A JPS52147069A (en) 1976-06-01 1976-06-01 Production of high quality masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6292776A JPS52147069A (en) 1976-06-01 1976-06-01 Production of high quality masks

Publications (2)

Publication Number Publication Date
JPS52147069A true JPS52147069A (en) 1977-12-07
JPS565057B2 JPS565057B2 (en) 1981-02-03

Family

ID=13214390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6292776A Granted JPS52147069A (en) 1976-06-01 1976-06-01 Production of high quality masks

Country Status (1)

Country Link
JP (1) JPS52147069A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501805A (en) * 1973-05-14 1975-01-09
JPS5011666A (en) * 1973-06-01 1975-02-06
JPS5160455A (en) * 1974-11-22 1976-05-26 Tokyo Shibaura Electric Co

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501805A (en) * 1973-05-14 1975-01-09
JPS5011666A (en) * 1973-06-01 1975-02-06
JPS5160455A (en) * 1974-11-22 1976-05-26 Tokyo Shibaura Electric Co

Also Published As

Publication number Publication date
JPS565057B2 (en) 1981-02-03

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