JPS5160455A - - Google Patents
Info
- Publication number
- JPS5160455A JPS5160455A JP13368074A JP13368074A JPS5160455A JP S5160455 A JPS5160455 A JP S5160455A JP 13368074 A JP13368074 A JP 13368074A JP 13368074 A JP13368074 A JP 13368074A JP S5160455 A JPS5160455 A JP S5160455A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13368074A JPS5160455A (en) | 1974-11-22 | 1974-11-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13368074A JPS5160455A (en) | 1974-11-22 | 1974-11-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5160455A true JPS5160455A (en) | 1976-05-26 |
Family
ID=15110359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13368074A Pending JPS5160455A (en) | 1974-11-22 | 1974-11-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5160455A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52147069A (en) * | 1976-06-01 | 1977-12-07 | Oki Electric Ind Co Ltd | Production of high quality masks |
JPS5498268A (en) * | 1978-01-16 | 1979-08-03 | Ibm | Method of inspecting position |
JPS59143159A (en) * | 1983-02-07 | 1984-08-16 | Mitsubishi Electric Corp | Pattern overlapping method for photoengraving process |
JPS60120360A (en) * | 1983-12-05 | 1985-06-27 | Nec Kyushu Ltd | Reduced projection type exposing device |
-
1974
- 1974-11-22 JP JP13368074A patent/JPS5160455A/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52147069A (en) * | 1976-06-01 | 1977-12-07 | Oki Electric Ind Co Ltd | Production of high quality masks |
JPS565057B2 (en) * | 1976-06-01 | 1981-02-03 | ||
JPS5498268A (en) * | 1978-01-16 | 1979-08-03 | Ibm | Method of inspecting position |
JPH0220921B2 (en) * | 1978-01-16 | 1990-05-11 | Intaanashonaru Bijinesu Mashiinzu Corp | |
JPS59143159A (en) * | 1983-02-07 | 1984-08-16 | Mitsubishi Electric Corp | Pattern overlapping method for photoengraving process |
JPS60120360A (en) * | 1983-12-05 | 1985-06-27 | Nec Kyushu Ltd | Reduced projection type exposing device |