JPS5160455A - - Google Patents

Info

Publication number
JPS5160455A
JPS5160455A JP13368074A JP13368074A JPS5160455A JP S5160455 A JPS5160455 A JP S5160455A JP 13368074 A JP13368074 A JP 13368074A JP 13368074 A JP13368074 A JP 13368074A JP S5160455 A JPS5160455 A JP S5160455A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13368074A
Other languages
Japanese (ja)
Inventor
Suekichi Inomata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP13368074A priority Critical patent/JPS5160455A/ja
Publication of JPS5160455A publication Critical patent/JPS5160455A/ja
Pending legal-status Critical Current

Links

JP13368074A 1974-11-22 1974-11-22 Pending JPS5160455A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13368074A JPS5160455A (en) 1974-11-22 1974-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13368074A JPS5160455A (en) 1974-11-22 1974-11-22

Publications (1)

Publication Number Publication Date
JPS5160455A true JPS5160455A (en) 1976-05-26

Family

ID=15110359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13368074A Pending JPS5160455A (en) 1974-11-22 1974-11-22

Country Status (1)

Country Link
JP (1) JPS5160455A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147069A (en) * 1976-06-01 1977-12-07 Oki Electric Ind Co Ltd Production of high quality masks
JPS5498268A (en) * 1978-01-16 1979-08-03 Ibm Method of inspecting position
JPS59143159A (en) * 1983-02-07 1984-08-16 Mitsubishi Electric Corp Pattern overlapping method for photoengraving process
JPS60120360A (en) * 1983-12-05 1985-06-27 Nec Kyushu Ltd Reduced projection type exposing device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147069A (en) * 1976-06-01 1977-12-07 Oki Electric Ind Co Ltd Production of high quality masks
JPS565057B2 (en) * 1976-06-01 1981-02-03
JPS5498268A (en) * 1978-01-16 1979-08-03 Ibm Method of inspecting position
JPH0220921B2 (en) * 1978-01-16 1990-05-11 Intaanashonaru Bijinesu Mashiinzu Corp
JPS59143159A (en) * 1983-02-07 1984-08-16 Mitsubishi Electric Corp Pattern overlapping method for photoengraving process
JPS60120360A (en) * 1983-12-05 1985-06-27 Nec Kyushu Ltd Reduced projection type exposing device

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