JPS5278375A - Aligning method - Google Patents

Aligning method

Info

Publication number
JPS5278375A
JPS5278375A JP50153972A JP15397275A JPS5278375A JP S5278375 A JPS5278375 A JP S5278375A JP 50153972 A JP50153972 A JP 50153972A JP 15397275 A JP15397275 A JP 15397275A JP S5278375 A JPS5278375 A JP S5278375A
Authority
JP
Japan
Prior art keywords
aligning method
diffracted
rays
mask
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50153972A
Other languages
Japanese (ja)
Inventor
Moritaka Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50153972A priority Critical patent/JPS5278375A/en
Publication of JPS5278375A publication Critical patent/JPS5278375A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve production process considerably by performing relative alignment of water and mask using diffracted X-rays.
COPYRIGHT: (C)1977,JPO&Japio
JP50153972A 1975-12-25 1975-12-25 Aligning method Pending JPS5278375A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50153972A JPS5278375A (en) 1975-12-25 1975-12-25 Aligning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50153972A JPS5278375A (en) 1975-12-25 1975-12-25 Aligning method

Publications (1)

Publication Number Publication Date
JPS5278375A true JPS5278375A (en) 1977-07-01

Family

ID=15574091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50153972A Pending JPS5278375A (en) 1975-12-25 1975-12-25 Aligning method

Country Status (1)

Country Link
JP (1) JPS5278375A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112280A (en) * 1976-03-17 1977-09-20 Mitsubishi Electric Corp X-ray exposure mask
JPS55113330A (en) * 1979-02-23 1980-09-01 Chiyou Lsi Gijutsu Kenkyu Kumiai X-ray exposure system and device
JPH02309A (en) * 1987-12-29 1990-01-05 Canon Inc Mask for x-ray and light exposing method using it
JPH05206011A (en) * 1991-10-11 1993-08-13 Internatl Business Mach Corp <Ibm> Apparatus and method for alignment of x-ray lithographic system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112280A (en) * 1976-03-17 1977-09-20 Mitsubishi Electric Corp X-ray exposure mask
JPS5746648B2 (en) * 1976-03-17 1982-10-05
JPS55113330A (en) * 1979-02-23 1980-09-01 Chiyou Lsi Gijutsu Kenkyu Kumiai X-ray exposure system and device
JPH02309A (en) * 1987-12-29 1990-01-05 Canon Inc Mask for x-ray and light exposing method using it
JPH05206011A (en) * 1991-10-11 1993-08-13 Internatl Business Mach Corp <Ibm> Apparatus and method for alignment of x-ray lithographic system

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