JPS5746648B2 - - Google Patents
Info
- Publication number
- JPS5746648B2 JPS5746648B2 JP2882976A JP2882976A JPS5746648B2 JP S5746648 B2 JPS5746648 B2 JP S5746648B2 JP 2882976 A JP2882976 A JP 2882976A JP 2882976 A JP2882976 A JP 2882976A JP S5746648 B2 JPS5746648 B2 JP S5746648B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2882976A JPS52112280A (en) | 1976-03-17 | 1976-03-17 | X-ray exposure mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2882976A JPS52112280A (en) | 1976-03-17 | 1976-03-17 | X-ray exposure mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52112280A JPS52112280A (en) | 1977-09-20 |
JPS5746648B2 true JPS5746648B2 (en) | 1982-10-05 |
Family
ID=12259267
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2882976A Granted JPS52112280A (en) | 1976-03-17 | 1976-03-17 | X-ray exposure mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52112280A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5743420A (en) * | 1980-08-29 | 1982-03-11 | Hitachi Ltd | Mask alignment method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4959576A (en) * | 1972-06-29 | 1974-06-10 | ||
JPS51147264A (en) * | 1975-06-13 | 1976-12-17 | Fujitsu Ltd | High-precision positioning system |
JPS5278375A (en) * | 1975-12-25 | 1977-07-01 | Fujitsu Ltd | Aligning method |
-
1976
- 1976-03-17 JP JP2882976A patent/JPS52112280A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4959576A (en) * | 1972-06-29 | 1974-06-10 | ||
JPS51147264A (en) * | 1975-06-13 | 1976-12-17 | Fujitsu Ltd | High-precision positioning system |
JPS5278375A (en) * | 1975-12-25 | 1977-07-01 | Fujitsu Ltd | Aligning method |
Also Published As
Publication number | Publication date |
---|---|
JPS52112280A (en) | 1977-09-20 |