JPS52130570A - Electron beam exposing device - Google Patents

Electron beam exposing device

Info

Publication number
JPS52130570A
JPS52130570A JP4810076A JP4810076A JPS52130570A JP S52130570 A JPS52130570 A JP S52130570A JP 4810076 A JP4810076 A JP 4810076A JP 4810076 A JP4810076 A JP 4810076A JP S52130570 A JPS52130570 A JP S52130570A
Authority
JP
Japan
Prior art keywords
electron beam
converter
deflecting device
exposing device
beam exposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4810076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5311832B2 (cg-RX-API-DMAC7.html
Inventor
Hidekazu Goto
Takashi Soma
Masanori Idesawa
Shinji Takayanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
RIKEN
Original Assignee
Jeol Ltd
Nihon Denshi KK
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, RIKEN filed Critical Jeol Ltd
Priority to JP4810076A priority Critical patent/JPS52130570A/ja
Publication of JPS52130570A publication Critical patent/JPS52130570A/ja
Publication of JPS5311832B2 publication Critical patent/JPS5311832B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4810076A 1976-04-27 1976-04-27 Electron beam exposing device Granted JPS52130570A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4810076A JPS52130570A (en) 1976-04-27 1976-04-27 Electron beam exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4810076A JPS52130570A (en) 1976-04-27 1976-04-27 Electron beam exposing device

Publications (2)

Publication Number Publication Date
JPS52130570A true JPS52130570A (en) 1977-11-01
JPS5311832B2 JPS5311832B2 (cg-RX-API-DMAC7.html) 1978-04-25

Family

ID=12793887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4810076A Granted JPS52130570A (en) 1976-04-27 1976-04-27 Electron beam exposing device

Country Status (1)

Country Link
JP (1) JPS52130570A (cg-RX-API-DMAC7.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101675A (en) * 1978-01-27 1979-08-10 Cho Lsi Gijutsu Kenkyu Kumiai Electron beam optical lens barrel
JPS55146931A (en) * 1979-05-04 1980-11-15 Hitachi Ltd Depicting method by electronic beam
JPS5793528A (en) * 1980-11-28 1982-06-10 Ibm Electron beam device
JPS60244024A (ja) * 1984-05-18 1985-12-03 Hitachi Ltd 電子線露光装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101675A (en) * 1978-01-27 1979-08-10 Cho Lsi Gijutsu Kenkyu Kumiai Electron beam optical lens barrel
JPS55146931A (en) * 1979-05-04 1980-11-15 Hitachi Ltd Depicting method by electronic beam
JPS5793528A (en) * 1980-11-28 1982-06-10 Ibm Electron beam device
JPS60244024A (ja) * 1984-05-18 1985-12-03 Hitachi Ltd 電子線露光装置

Also Published As

Publication number Publication date
JPS5311832B2 (cg-RX-API-DMAC7.html) 1978-04-25

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