JPS52124872A - Electron beam exposure device - Google Patents
Electron beam exposure deviceInfo
- Publication number
- JPS52124872A JPS52124872A JP4120476A JP4120476A JPS52124872A JP S52124872 A JPS52124872 A JP S52124872A JP 4120476 A JP4120476 A JP 4120476A JP 4120476 A JP4120476 A JP 4120476A JP S52124872 A JPS52124872 A JP S52124872A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure device
- beam exposure
- driving shaft
- elongating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To attenuate the oscillations of an exposing stage driving shaft by using elongating and contracting of a bellows with movement of the driving shaft.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4120476A JPS52124872A (en) | 1976-04-14 | 1976-04-14 | Electron beam exposure device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4120476A JPS52124872A (en) | 1976-04-14 | 1976-04-14 | Electron beam exposure device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52124872A true JPS52124872A (en) | 1977-10-20 |
Family
ID=12601875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4120476A Pending JPS52124872A (en) | 1976-04-14 | 1976-04-14 | Electron beam exposure device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52124872A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0187533U (en) * | 1987-12-01 | 1989-06-09 | ||
WO2000016371A1 (en) * | 1998-09-16 | 2000-03-23 | Hitachi, Ltd. | Beam-utilizing equipment |
-
1976
- 1976-04-14 JP JP4120476A patent/JPS52124872A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0187533U (en) * | 1987-12-01 | 1989-06-09 | ||
WO2000016371A1 (en) * | 1998-09-16 | 2000-03-23 | Hitachi, Ltd. | Beam-utilizing equipment |
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