JPS52122083A - Electron beam exposing device - Google Patents
Electron beam exposing deviceInfo
- Publication number
- JPS52122083A JPS52122083A JP3764176A JP3764176A JPS52122083A JP S52122083 A JPS52122083 A JP S52122083A JP 3764176 A JP3764176 A JP 3764176A JP 3764176 A JP3764176 A JP 3764176A JP S52122083 A JPS52122083 A JP S52122083A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposing device
- beam exposing
- deflecting
- masks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: Exposure speed is considerably increased by deflecting an electron beam passing through two sheets of masks to vary their sectional shape and size and scanning at a high speed over the reduced picture by way of a D/A converter of a small number of bits.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3764176A JPS52122083A (en) | 1976-04-02 | 1976-04-02 | Electron beam exposing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3764176A JPS52122083A (en) | 1976-04-02 | 1976-04-02 | Electron beam exposing device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4611977A Division JPS52120686A (en) | 1977-04-21 | 1977-04-21 | Electronic ray exposure method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52122083A true JPS52122083A (en) | 1977-10-13 |
JPS5311830B2 JPS5311830B2 (en) | 1978-04-25 |
Family
ID=12503266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3764176A Granted JPS52122083A (en) | 1976-04-02 | 1976-04-02 | Electron beam exposing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52122083A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52120686A (en) * | 1977-04-21 | 1977-10-11 | Jeol Ltd | Electronic ray exposure method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3638231A (en) * | 1968-05-27 | 1972-01-25 | Tno | Device for recording with electron rays |
-
1976
- 1976-04-02 JP JP3764176A patent/JPS52122083A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3638231A (en) * | 1968-05-27 | 1972-01-25 | Tno | Device for recording with electron rays |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52120686A (en) * | 1977-04-21 | 1977-10-11 | Jeol Ltd | Electronic ray exposure method |
JPS5324792B2 (en) * | 1977-04-21 | 1978-07-22 |
Also Published As
Publication number | Publication date |
---|---|
JPS5311830B2 (en) | 1978-04-25 |
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