JPS52127785A - Preparation for semiconductor device - Google Patents

Preparation for semiconductor device

Info

Publication number
JPS52127785A
JPS52127785A JP4461976A JP4461976A JPS52127785A JP S52127785 A JPS52127785 A JP S52127785A JP 4461976 A JP4461976 A JP 4461976A JP 4461976 A JP4461976 A JP 4461976A JP S52127785 A JPS52127785 A JP S52127785A
Authority
JP
Japan
Prior art keywords
preparation
semiconductor device
film
resist layer
polyamide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4461976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5734663B2 (enExample
Inventor
Makoto Serigano
Masanao Itoga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4461976A priority Critical patent/JPS52127785A/ja
Publication of JPS52127785A publication Critical patent/JPS52127785A/ja
Publication of JPS5734663B2 publication Critical patent/JPS5734663B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
JP4461976A 1976-04-19 1976-04-19 Preparation for semiconductor device Granted JPS52127785A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4461976A JPS52127785A (en) 1976-04-19 1976-04-19 Preparation for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4461976A JPS52127785A (en) 1976-04-19 1976-04-19 Preparation for semiconductor device

Publications (2)

Publication Number Publication Date
JPS52127785A true JPS52127785A (en) 1977-10-26
JPS5734663B2 JPS5734663B2 (enExample) 1982-07-24

Family

ID=12696441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4461976A Granted JPS52127785A (en) 1976-04-19 1976-04-19 Preparation for semiconductor device

Country Status (1)

Country Link
JP (1) JPS52127785A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125633A (en) * 1979-03-22 1980-09-27 Mitsubishi Electric Corp Production of semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6162470U (enExample) * 1984-09-28 1986-04-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125633A (en) * 1979-03-22 1980-09-27 Mitsubishi Electric Corp Production of semiconductor device

Also Published As

Publication number Publication date
JPS5734663B2 (enExample) 1982-07-24

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