JPS52117562A - Manufacturing method and device for semiconductor device - Google Patents

Manufacturing method and device for semiconductor device

Info

Publication number
JPS52117562A
JPS52117562A JP3483076A JP3483076A JPS52117562A JP S52117562 A JPS52117562 A JP S52117562A JP 3483076 A JP3483076 A JP 3483076A JP 3483076 A JP3483076 A JP 3483076A JP S52117562 A JPS52117562 A JP S52117562A
Authority
JP
Japan
Prior art keywords
etching
manufacturing
semiconductor device
measuring
metal layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3483076A
Other languages
Japanese (ja)
Inventor
Takashi Matsuda
Taizo Ohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3483076A priority Critical patent/JPS52117562A/en
Publication of JPS52117562A publication Critical patent/JPS52117562A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To clearly grasp the etching termination of wiring metal layer for etching of A with etching liquid containing HNO3, by measuring the etching completion through oxidation restoration potential or optical absorption.
COPYRIGHT: (C)1977,JPO&Japio
JP3483076A 1976-03-30 1976-03-30 Manufacturing method and device for semiconductor device Pending JPS52117562A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3483076A JPS52117562A (en) 1976-03-30 1976-03-30 Manufacturing method and device for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3483076A JPS52117562A (en) 1976-03-30 1976-03-30 Manufacturing method and device for semiconductor device

Publications (1)

Publication Number Publication Date
JPS52117562A true JPS52117562A (en) 1977-10-03

Family

ID=12425105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3483076A Pending JPS52117562A (en) 1976-03-30 1976-03-30 Manufacturing method and device for semiconductor device

Country Status (1)

Country Link
JP (1) JPS52117562A (en)

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