JPS52115663A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS52115663A
JPS52115663A JP3193276A JP3193276A JPS52115663A JP S52115663 A JPS52115663 A JP S52115663A JP 3193276 A JP3193276 A JP 3193276A JP 3193276 A JP3193276 A JP 3193276A JP S52115663 A JPS52115663 A JP S52115663A
Authority
JP
Japan
Prior art keywords
semiconductor device
channel regions
providing
insulating film
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3193276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6123669B2 (enrdf_load_stackoverflow
Inventor
Fujio Masuoka
Kenji Natori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3193276A priority Critical patent/JPS52115663A/ja
Publication of JPS52115663A publication Critical patent/JPS52115663A/ja
Priority to US05/955,879 priority patent/US4243997A/en
Publication of JPS6123669B2 publication Critical patent/JPS6123669B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/025—Manufacture or treatment forming recessed gates, e.g. by using local oxidation
JP3193276A 1976-03-25 1976-03-25 Semiconductor device Granted JPS52115663A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3193276A JPS52115663A (en) 1976-03-25 1976-03-25 Semiconductor device
US05/955,879 US4243997A (en) 1976-03-25 1978-10-30 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3193276A JPS52115663A (en) 1976-03-25 1976-03-25 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS52115663A true JPS52115663A (en) 1977-09-28
JPS6123669B2 JPS6123669B2 (enrdf_load_stackoverflow) 1986-06-06

Family

ID=12344733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3193276A Granted JPS52115663A (en) 1976-03-25 1976-03-25 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS52115663A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5491069A (en) * 1977-12-28 1979-07-19 Nec Corp Mos field effect transistor
JPS54111444U (enrdf_load_stackoverflow) * 1978-01-24 1979-08-06
JPS5499573A (en) * 1978-01-24 1979-08-06 Pioneer Electronic Corp Field effect transistor
JPS54113858U (enrdf_load_stackoverflow) * 1978-01-24 1979-08-10
JPS61104671A (ja) * 1984-10-29 1986-05-22 Sharp Corp 電界効果トランジスタ
US5371024A (en) * 1988-09-30 1994-12-06 Kabushiki Kaisha Toshiba Semiconductor device and process for manufacturing the same
WO2008093824A1 (ja) * 2007-02-01 2008-08-07 Rohm Co., Ltd. ＧａＮ系半導体素子

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973982A (enrdf_load_stackoverflow) * 1972-11-16 1974-07-17
JPS508483A (enrdf_load_stackoverflow) * 1973-05-21 1975-01-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973982A (enrdf_load_stackoverflow) * 1972-11-16 1974-07-17
JPS508483A (enrdf_load_stackoverflow) * 1973-05-21 1975-01-28

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5491069A (en) * 1977-12-28 1979-07-19 Nec Corp Mos field effect transistor
JPS54111444U (enrdf_load_stackoverflow) * 1978-01-24 1979-08-06
JPS5499573A (en) * 1978-01-24 1979-08-06 Pioneer Electronic Corp Field effect transistor
JPS54113858U (enrdf_load_stackoverflow) * 1978-01-24 1979-08-10
JPS61104671A (ja) * 1984-10-29 1986-05-22 Sharp Corp 電界効果トランジスタ
US5371024A (en) * 1988-09-30 1994-12-06 Kabushiki Kaisha Toshiba Semiconductor device and process for manufacturing the same
WO2008093824A1 (ja) * 2007-02-01 2008-08-07 Rohm Co., Ltd. ＧａＮ系半導体素子

Also Published As

Publication number Publication date
JPS6123669B2 (enrdf_load_stackoverflow) 1986-06-06

Similar Documents

Publication Publication Date Title
JPS5279679A (en) Semiconductor memory device
JPS52115663A (en) Semiconductor device
JPS53142189A (en) Insulating gate type field effect transistor
JPS5367371A (en) Semiconductor device
JPS53149771A (en) Mis-type semiconductor device and its manufacture
JPS538074A (en) Mis type semiconductor device
JPS5372470A (en) Semiconductor device
JPS5376771A (en) Insulated gate type field effect transistor
JPS52135273A (en) Mos type semiconductor device
JPS52127078A (en) Semiconductor device
JPS52153383A (en) Preparation of semiconductor device
JPS5299789A (en) Vertical field effect transistor
JPS5367373A (en) Semiconductor device
JPS5318982A (en) Insulated gate type semiconductor device
JPS535580A (en) Field effect type semiconductor device
JPS5384575A (en) Semicocductor device
JPS52123878A (en) Mos type semiconductor device and its production process
JPS52100878A (en) Field effect transistor
JPS5353965A (en) Semiconductor device and its production
JPS534478A (en) Semiconductor device
JPS539483A (en) Semiconductor device
JPS51135381A (en) Semiconductor device and its manufacturing method
JPS5342683A (en) Vertical field effect transistor
JPS52147983A (en) Insulation gate type semiconductor device
JPS5384690A (en) Field effect transistor