JPS52112290A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS52112290A
JPS52112290A JP2901976A JP2901976A JPS52112290A JP S52112290 A JPS52112290 A JP S52112290A JP 2901976 A JP2901976 A JP 2901976A JP 2901976 A JP2901976 A JP 2901976A JP S52112290 A JPS52112290 A JP S52112290A
Authority
JP
Japan
Prior art keywords
substrate
manufacture
semiconductor device
resin
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2901976A
Other languages
English (en)
Inventor
Kenji Yano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2901976A priority Critical patent/JPS52112290A/ja
Publication of JPS52112290A publication Critical patent/JPS52112290A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP2901976A 1976-03-17 1976-03-17 Manufacture of semiconductor device Pending JPS52112290A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2901976A JPS52112290A (en) 1976-03-17 1976-03-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2901976A JPS52112290A (en) 1976-03-17 1976-03-17 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52112290A true JPS52112290A (en) 1977-09-20

Family

ID=12264688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2901976A Pending JPS52112290A (en) 1976-03-17 1976-03-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52112290A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01256146A (ja) * 1988-04-06 1989-10-12 Sony Corp 半導体装置
US8257528B2 (en) * 2008-08-15 2012-09-04 Shin-Etsu Chemical Co., Ltd. Substrate joining method and 3-D semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01256146A (ja) * 1988-04-06 1989-10-12 Sony Corp 半導体装置
US8257528B2 (en) * 2008-08-15 2012-09-04 Shin-Etsu Chemical Co., Ltd. Substrate joining method and 3-D semiconductor device

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