JPS513743U - - Google Patents

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Publication number
JPS513743U
JPS513743U JP7466274U JP7466274U JPS513743U JP S513743 U JPS513743 U JP S513743U JP 7466274 U JP7466274 U JP 7466274U JP 7466274 U JP7466274 U JP 7466274U JP S513743 U JPS513743 U JP S513743U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7466274U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7466274U priority Critical patent/JPS513743U/ja
Publication of JPS513743U publication Critical patent/JPS513743U/ja
Pending legal-status Critical Current

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  • Reciprocating Pumps (AREA)
  • Hydraulic Motors (AREA)
JP7466274U 1974-06-25 1974-06-25 Pending JPS513743U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7466274U JPS513743U (ja) 1974-06-25 1974-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7466274U JPS513743U (ja) 1974-06-25 1974-06-25

Publications (1)

Publication Number Publication Date
JPS513743U true JPS513743U (ja) 1976-01-12

Family

ID=28247119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7466274U Pending JPS513743U (ja) 1974-06-25 1974-06-25

Country Status (1)

Country Link
JP (1) JPS513743U (ja)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54163933A (en) * 1978-06-17 1979-12-27 Dainippon Screen Mfg Plate attach detach device in rotary coating machine
JPS5785236A (en) * 1980-11-18 1982-05-27 Nippon Kogaku Kk <Nikon> Carrier device for glass substrate or the like
JPS57132454U (ja) * 1981-02-12 1982-08-18
JPS5848935A (ja) * 1981-09-18 1983-03-23 Tokyo Ohka Kogyo Co Ltd 自動プラズマ処理装置
JPS5860552A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置
JPS58118125A (ja) * 1982-01-05 1983-07-14 Tatsumo Kk 基板の搬送装置
JPS58168229A (ja) * 1982-03-22 1983-10-04 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン 処理方法
JPS5988824A (ja) * 1982-11-12 1984-05-22 Hitachi Tokyo Electronics Co Ltd ウエハ処理装置
JPS59144220U (ja) * 1983-03-18 1984-09-27 トキコ株式会社 圧縮機の連接棒
JPS59213130A (ja) * 1983-05-18 1984-12-03 Toshiba Corp レジスト塗布装置
JPS59182932U (ja) * 1983-05-23 1984-12-06 不二越機械工業株式会社 ウエハ−搬送装置
JPS59228719A (ja) * 1983-06-10 1984-12-22 Hitachi Tokyo Electronics Co Ltd 電子部品の製造方法および製造装置
JPS6042730U (ja) * 1983-08-31 1985-03-26 関西日本電気株式会社 半導体製造装置
JPS6098638A (ja) * 1983-11-02 1985-06-01 Seiei Kosan Kk 乾板等移送装置
JPS6115737U (ja) * 1984-07-04 1986-01-29 島田理化工業株式会社 ウエ−ハ試験装置
JPS6151732U (ja) * 1984-09-10 1986-04-07
JPS61158156A (ja) * 1984-12-28 1986-07-17 Koyo Rindobaagu Kk 半導体ウエハの搬送装置
JPS6284517A (ja) * 1985-10-08 1987-04-18 Kuretsuku Syst:Kk 感光剤塗布処理装置
JPS63178329U (ja) * 1988-04-13 1988-11-18

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5649451B2 (ja) * 1978-06-17 1981-11-21
JPS54163933A (en) * 1978-06-17 1979-12-27 Dainippon Screen Mfg Plate attach detach device in rotary coating machine
JPS5785236A (en) * 1980-11-18 1982-05-27 Nippon Kogaku Kk <Nikon> Carrier device for glass substrate or the like
JPS623979B2 (ja) * 1980-11-18 1987-01-28 Nippon Kogaku Kk
JPS62192Y2 (ja) * 1981-02-12 1987-01-07
JPS57132454U (ja) * 1981-02-12 1982-08-18
JPS5848935A (ja) * 1981-09-18 1983-03-23 Tokyo Ohka Kogyo Co Ltd 自動プラズマ処理装置
JPH0325938B2 (ja) * 1981-09-18 1991-04-09 Tokyo Ohka Kogyo Co Ltd
JPS5860552A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置
JPS6325500B2 (ja) * 1981-10-05 1988-05-25 Tokyo Ohka Kogyo Co Ltd
JPS58118125A (ja) * 1982-01-05 1983-07-14 Tatsumo Kk 基板の搬送装置
JPS632142B2 (ja) * 1982-01-05 1988-01-18 Tatsumo Kk
JPS58168229A (ja) * 1982-03-22 1983-10-04 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン 処理方法
JPH0136697B2 (ja) * 1982-03-22 1989-08-02 Intaanashonaru Bijinesu Mashiinzu Corp
JPS5988824A (ja) * 1982-11-12 1984-05-22 Hitachi Tokyo Electronics Co Ltd ウエハ処理装置
JPS59144220U (ja) * 1983-03-18 1984-09-27 トキコ株式会社 圧縮機の連接棒
JPS59213130A (ja) * 1983-05-18 1984-12-03 Toshiba Corp レジスト塗布装置
JPS59182932U (ja) * 1983-05-23 1984-12-06 不二越機械工業株式会社 ウエハ−搬送装置
JPH019165Y2 (ja) * 1983-05-23 1989-03-13
JPS59228719A (ja) * 1983-06-10 1984-12-22 Hitachi Tokyo Electronics Co Ltd 電子部品の製造方法および製造装置
JPS6042730U (ja) * 1983-08-31 1985-03-26 関西日本電気株式会社 半導体製造装置
JPS6098638A (ja) * 1983-11-02 1985-06-01 Seiei Kosan Kk 乾板等移送装置
JPS6115737U (ja) * 1984-07-04 1986-01-29 島田理化工業株式会社 ウエ−ハ試験装置
JPS6151732U (ja) * 1984-09-10 1986-04-07
JPS61158156A (ja) * 1984-12-28 1986-07-17 Koyo Rindobaagu Kk 半導体ウエハの搬送装置
JPS6284517A (ja) * 1985-10-08 1987-04-18 Kuretsuku Syst:Kk 感光剤塗布処理装置
JPS63178329U (ja) * 1988-04-13 1988-11-18

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