JPS54163933A - Plate attach detach device in rotary coating machine - Google Patents
Plate attach detach device in rotary coating machineInfo
- Publication number
- JPS54163933A JPS54163933A JP7337278A JP7337278A JPS54163933A JP S54163933 A JPS54163933 A JP S54163933A JP 7337278 A JP7337278 A JP 7337278A JP 7337278 A JP7337278 A JP 7337278A JP S54163933 A JPS54163933 A JP S54163933A
- Authority
- JP
- Japan
- Prior art keywords
- coating machine
- rotary coating
- detach device
- plate attach
- attach detach
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7337278A JPS54163933A (en) | 1978-06-17 | 1978-06-17 | Plate attach detach device in rotary coating machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7337278A JPS54163933A (en) | 1978-06-17 | 1978-06-17 | Plate attach detach device in rotary coating machine |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54163933A true JPS54163933A (en) | 1979-12-27 |
JPS5649451B2 JPS5649451B2 (en) | 1981-11-21 |
Family
ID=13516270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7337278A Granted JPS54163933A (en) | 1978-06-17 | 1978-06-17 | Plate attach detach device in rotary coating machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54163933A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS513743U (en) * | 1974-06-25 | 1976-01-12 |
-
1978
- 1978-06-17 JP JP7337278A patent/JPS54163933A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS513743U (en) * | 1974-06-25 | 1976-01-12 |
Also Published As
Publication number | Publication date |
---|---|
JPS5649451B2 (en) | 1981-11-21 |
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