JPS54163933A - Plate attach detach device in rotary coating machine - Google Patents

Plate attach detach device in rotary coating machine

Info

Publication number
JPS54163933A
JPS54163933A JP7337278A JP7337278A JPS54163933A JP S54163933 A JPS54163933 A JP S54163933A JP 7337278 A JP7337278 A JP 7337278A JP 7337278 A JP7337278 A JP 7337278A JP S54163933 A JPS54163933 A JP S54163933A
Authority
JP
Japan
Prior art keywords
coating machine
rotary coating
detach device
plate attach
attach detach
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7337278A
Other languages
Japanese (ja)
Other versions
JPS5649451B2 (en
Inventor
Mikio Shiyouda
Nobutoshi Daishin
Akira Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP7337278A priority Critical patent/JPS54163933A/en
Publication of JPS54163933A publication Critical patent/JPS54163933A/en
Publication of JPS5649451B2 publication Critical patent/JPS5649451B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP7337278A 1978-06-17 1978-06-17 Plate attach detach device in rotary coating machine Granted JPS54163933A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7337278A JPS54163933A (en) 1978-06-17 1978-06-17 Plate attach detach device in rotary coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7337278A JPS54163933A (en) 1978-06-17 1978-06-17 Plate attach detach device in rotary coating machine

Publications (2)

Publication Number Publication Date
JPS54163933A true JPS54163933A (en) 1979-12-27
JPS5649451B2 JPS5649451B2 (en) 1981-11-21

Family

ID=13516270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7337278A Granted JPS54163933A (en) 1978-06-17 1978-06-17 Plate attach detach device in rotary coating machine

Country Status (1)

Country Link
JP (1) JPS54163933A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (en) * 1974-06-25 1976-01-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (en) * 1974-06-25 1976-01-12

Also Published As

Publication number Publication date
JPS5649451B2 (en) 1981-11-21

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