JPS51147964A - Method of manufacturing semiconductor device - Google Patents

Method of manufacturing semiconductor device

Info

Publication number
JPS51147964A
JPS51147964A JP7145975A JP7145975A JPS51147964A JP S51147964 A JPS51147964 A JP S51147964A JP 7145975 A JP7145975 A JP 7145975A JP 7145975 A JP7145975 A JP 7145975A JP S51147964 A JPS51147964 A JP S51147964A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing semiconductor
manufacturing
contaction
psg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7145975A
Other languages
Japanese (ja)
Inventor
Hitoshi Hasegawa
Yoshiiku Togei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7145975A priority Critical patent/JPS51147964A/en
Publication of JPS51147964A publication Critical patent/JPS51147964A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: A method of manufacturing a semiconductor device capable of improving the close contaction between a photoresist and PSG without complicating the manufacturing process.
COPYRIGHT: (C)1976,JPO&Japio
JP7145975A 1975-06-14 1975-06-14 Method of manufacturing semiconductor device Pending JPS51147964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7145975A JPS51147964A (en) 1975-06-14 1975-06-14 Method of manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7145975A JPS51147964A (en) 1975-06-14 1975-06-14 Method of manufacturing semiconductor device

Publications (1)

Publication Number Publication Date
JPS51147964A true JPS51147964A (en) 1976-12-18

Family

ID=13461174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7145975A Pending JPS51147964A (en) 1975-06-14 1975-06-14 Method of manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS51147964A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4936346A (en) * 1972-08-04 1974-04-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4936346A (en) * 1972-08-04 1974-04-04

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